ISO 16700:2016
(Main)Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.
Analyse par microfaisceaux — Microscopie électronique à balayage — Lignes directrices pour l'étalonnage du grandissement d'image
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DRAFT INTERNATIONAL STANDARD
ISO/DIS 16700
ISO/TC 202/SC 4 Secretariat: JISC
Voting begins on: Voting terminates on:
2015-09-17 2015-12-16
Microbeam analysis — Scanning electron microscopy —
Guidelines for calibrating image magnification
Analyse par microfaisceaux — Microscopie électronique à balayage — Lignes directrices pour l’étalonnage
du grandissement d’image
ICS: 37.020
THIS DOCUMENT IS A DRAFT CIRCULATED
FOR COMMENT AND APPROVAL. IT IS
THEREFORE SUBJECT TO CHANGE AND MAY
NOT BE REFERRED TO AS AN INTERNATIONAL
STANDARD UNTIL PUBLISHED AS SUCH.
IN ADDITION TO THEIR EVALUATION AS
BEING ACCEPTABLE FOR INDUSTRIAL,
TECHNOLOGICAL, COMMERCIAL AND
USER PURPOSES, DRAFT INTERNATIONAL
STANDARDS MAY ON OCCASION HAVE TO
BE CONSIDERED IN THE LIGHT OF THEIR
POTENTIAL TO BECOME STANDARDS TO
WHICH REFERENCE MAY BE MADE IN
Reference number
NATIONAL REGULATIONS.
ISO/DIS 16700:2015(E)
RECIPIENTS OF THIS DRAFT ARE INVITED
TO SUBMIT, WITH THEIR COMMENTS,
NOTIFICATION OF ANY RELEVANT PATENT
RIGHTS OF WHICH THEY ARE AWARE AND TO
©
PROVIDE SUPPORTING DOCUMENTATION. ISO 2015
ISO/DIS 16700:2015(E) ISO/DIS 16700:2015(E)
Contents Page
Foreword . iv
Introduction . v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Image magnification . 3
4.1 Scale marker . 3
4.2 Expressing magnification . 3
5 Reference material . 4
5.1 General . 4
5.2 Requirements for CRM . 4
5.3 Pitch patterns on CRM . 4
5.4 Storage and handling . 4
6 Calibration procedures . 5
6.1 General . 5
6.2 Mounting CRM . 5
6.3 Setting SEM operation conditions for calibration . 5
6.4 Image recording . 6
6.5 Measurement of image . 6
6.6 Calibration of magnification and scale marker . 7
7 Accuracy of image magnification and scale marker . 8
8 Calibration report . 9
8.1 General . 9
8.2 Contents of calibration report . 9
Annex A (informative) Reference materials for magnification . 10
Annex B (informative) Parameters that influence the resultant magnification of an SEM . 12
Annex C (informative) Uncertainties in magnification measurements . 14
Annex D (informative) Example of a test report . 15
Bibliography …………………………………………………………………………………………………………….17
© ISO 2015, Published in Switzerland
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form
or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior
written permission. Permission can be requested from either ISO at the address below or ISO’s member body in the country of
the requester.
ISO copyright office
Ch. de Blandonnet 8 • CP 401
CH-1214 Vernier, Geneva, Switzerland
Tel. +41 22 749 01 11
Fax +41 22 749 09 47
copyright@iso.org
www.iso.org
ii © ISO 2015 – All rights reserved
ISO/DIS 16700:2015(E)
Contents Page
Foreword . iv
Introduction . v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Image magnification . 3
4.1 Scale marker . 3
4.2 Expressing magnification . 3
5 Reference material . 4
5.1 General . 4
5.2 Requirements for CRM . 4
5.3 Pitch patterns on CRM . 4
5.4 Storage and handling . 4
6 Calibration procedures . 5
6.1 General . 5
6.2 Mounting CRM . 5
6.3 Setting SEM operation conditions for calibration . 5
6.4 Image recording . 6
6.5 Measurement of image . 6
6.6 Calibration of magnification and scale marker . 7
7 Accuracy of image magnification and scale marker . 8
8 Calibration report . 9
8.1 General . 9
8.2 Contents of calibration report . 9
Annex A (informative) Reference materials for magnification . 10
Annex B (informative) Parameters that influence the resultant magnification of an SEM . 12
Annex C (informative) Uncertainties in magnification measurements . 14
Annex D (informative) Example of a test report . 15
Bibliography …………………………………………………………………………………………………………….17
ISO/DIS 16700:2015(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies
(ISO member bodies). The work of preparing International Standards is normally carried out through ISO
technical committees. Each member body interested in a subject for which a technical committee has been
established has the right to be represented on that committee. International organizations, governmental and
non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International
Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are described in
the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the different types of ISO
documents should be noted. This document was drafted in accordance with the editorial rules of the ISO/IEC
Directives, Part 2. www.iso.org/directives
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of any patent rights
identified during the development of the document will be in the Introduction and/or on the ISO list of patent
declarations received. www.iso.org/patents
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation on the meaning of ISO specific terms and expressions related to conformity assessment, as
well as information about ISO's adherence to the WTO principles in the Technical Barriers to Trade (TBT) see
the following URL: Foreword - Supplementary information
The committee responsible for this document is ISO/TC 202.
This second edition cancels and replaces the first edition ISO16700:2004(E).
ISO/DIS 16700:2015(E)
Introduction
The scanning electron microscope is widely used to investigate the surface structure of a range of important
materials such as semiconductors, metals, polymers, glass, food and biological materials and this International
Standard is relevant to the need for magnification calibration of the images. It describes the requirements for
calibration of the image magnification in the scanning electron microscope using a reference material or a
certified reference material.
INTERNATIONAL STANDARD ISO/DIS 16700 :2015(E)
Microbeam analysis — Scanning electron microscopy —
Guidelines for calibrating image magnification
1 Scope
This International Standard specifies a method for calibrating the magnification of images generated by a
scanning electron microscope (SEM) using an appropriate reference material. This method is limited to
magnifications determined by the available size range of structures in the calibrating reference material. This
International Standard does not apply to the dedicated critical dimension measurement SEM.
2 Normative references
The following referenced documents are indispensable for the application of this document. For dated
references, only the edition cited applies. For undated references, the latest edition of the referenced document
(including any amendments) applies.
ISO Guide 30, Reference materials — Selected terms and definitions
ISO Guide 34, General requirements for the competence of reference material producers
ISO Guide 35, Reference materials -- General and statistical principles for certification
ISO 5725-1, Accuracy (trueness and precision) of measurement methods and results — Part 1: General principles
and definitions
ISO/IEC 17025, General requirements for the competence of testing and calibration laboratories
ISO/IEC Guide 98-3, Uncertainty of measurement – Part 3: Guide to the expression of uncertainty in measurement
(GUM: 1995)
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
3.1
scanning electron microscope (SEM)
instrument that produces magnified images of a specimen by scanning its surface with an electron beam
3.2
...
INTERNATIONAL ISO
STANDARD 16700
Second edition
2016-08-01
Microbeam analysis — Scanning
electron microscopy — Guidelines for
calibrating image magnification
Analyse par microfaisceaux — Microscopie électronique à balayage
— Lignes directrices pour l’étalonnage du grandissement d’image
Reference number
©
ISO 2016
© ISO 2016, Published in Switzerland
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form
or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior
written permission. Permission can be requested from either ISO at the address below or ISO’s member body in the country of
the requester.
ISO copyright office
Ch. de Blandonnet 8 • CP 401
CH-1214 Vernier, Geneva, Switzerland
Tel. +41 22 749 01 11
Fax +41 22 749 09 47
copyright@iso.org
www.iso.org
ii © ISO 2016 – All rights reserved
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Image magnification . 3
4.1 Scale marker . 3
4.2 Expressing magnification . 3
5 Reference material . 3
5.1 General . 3
5.2 Requirements for CRM . 4
5.3 Pitch patterns on CRM . 4
5.4 Storage and handling . 4
6 Calibration procedures . 5
6.1 General . 5
6.2 Mounting CRM . 5
6.3 Setting SEM operation conditions for calibration . 5
6.4 Image recording . 6
6.5 Measurement of image . 6
6.6 Calibration of magnification and scale marker . 7
6.6.1 General. 7
6.6.2 Magnification . 7
6.6.3 Scale marker . 7
7 Accuracy of image magnification and scale marker . 8
8 Calibration report . 9
8.1 General . 9
8.2 Contents of calibration report . 9
Annex A (informative) Reference materials for magnification .11
Annex B (informative) Parameters that influence the resultant magnification of an SEM .13
Annex C (informative) Uncertainties in magnification measurements .15
Annex D (informative) Example of a test report .16
Bibliography .18
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out
through ISO technical committees. Each member body interested in a subject for which a technical
committee has been established has the right to be represented on that committee. International
organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.
ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of
electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are
described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the
different types of ISO documents should be noted. This document was drafted in accordance with the
editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives).
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of
any patent rights identified during the development of the document will be in the Introduction and/or
on the ISO list of patent declarations received (see www.iso.org/patents).
Any trade name used in this document is information given for the convenience of users and does not
constitute an endorsement.
For an explanation on the meaning of ISO specific terms and expressions related to conformity assessment,
as well as information about ISO’s adherence to the World Trade Organization (WTO) principles in the
Technical Barriers to Trade (TBT) see the following URL: www.iso.org/iso/foreword.html.
The committee responsible for this document is ISO/TC 202, Microbeam analysis, Subcommittee SC 4,
Scanning electron microscopy (SEM).
This second edition cancels and replaces the first edition (ISO 16700:2004), which has been technically
revised.
iv © ISO 2016 – All rights reserved
Introduction
The scanning electron microscope is widely used to investigate the surface structure of a range of
important materials such as semiconductors, metals, polymers, glass, food and biological materials,
and this International Standard is relevant to the need for magnification calibration of the images.
It describes the requirements for calibration of the image magnification in the scanning electron
microscope using a reference material or a certified reference material.
INTERNATIONAL STANDARD ISO 16700:2016(E)
Microbeam analysis — Scanning electron microscopy —
Guidelines for calibrating image magnification
1 Scope
This International Standard specifies a method for calibrating the magnification of images generated by
a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to
magnifications determined by the available size range of structures in the calibrating reference material.
This International Standard does not apply to the dedicated critical dimension measurement SEM.
2 Normative references
The following documents, in whole or in part, are normatively referenced in this document and are
indispensable for its application. For dated references, only the edition cited applies. For undated
references, the latest edition of the referenced document (including any amendments) applies.
ISO/IEC 17025:2005, General requirements for the competence of testing and calibration laboratories
ISO Guide 30, Reference materials — Selected terms and definitions
ISO Guide 34, General requirements for the competence of reference material producers
ISO Guide 35, Reference materials — General and statistical principles for certification
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
3.1
scanning electron microscope
SEM
instrument that produces magnified images of a specimen by scanning its surface with an electron beam
3.2
image
two-dimensional representation of the specimen surface generated by SEM (3.1)
Note 1 to entry: A photograph of a specimen taken using an SEM is a good example of an image.
3.3
image magnification
ratio of the linear dimension of the scan display to the corresponding linear dimension of the specimen
scan field
3.4
scale marker
line/generated line (intervals) on the image (3.2) representing a designated actual length in the
specimen
3.5
reference material
RM
material, sufficiently homogeneous and stable with respect to one or more specified properties, which
has been established to be fit for its intended use in a measurement process
3.6
certified reference material
CRM
reference material (3.5) characterized by a metrologically valid procedure for one or more specified
properties, accompanied by a certificate that provides the value of the specified property, its associated
uncertainty, and a statement of metrological traceability
Note 1 to entry: For the purposes of this International Standard, an RM/CRM possesses pitch pattern(s) with the
desired range of pitch size(s) and accuracy, to be used for the calibration of the image magnification (3.3).
3.7
calibration
set of operations which establish, under specified conditions, the relationship between the magnification
indicated by the SEM (3.1) and the corresponding magnification determined by examination of an RM
(3.5) or a CRM (3.6)
3.8
tilt angle
angle of the inclined specimen surface from the plane perpendicular to the electron beam axis
Note 1 to entry: See Figure 1.
Key
1 tilted specimen
2 electron beam
3 specimen
4 tilt angle
Figure 1 — Tilt angle
3.9
display
analog or digital device used for visualization of images (3.2)
Note 1 to entry: Examples of display are a cathode ray tube, plasma display panel, liquid crystal display, etc.
3.10
working distance
distance between the specimen surface and the bottom plane of the objective lens of the SEM (3.1)
3.11
pitch
closest separation of two similar features on a specimen which are equivalent points on a repeat pattern
2 © ISO 2016 – All rights reserved
3.12
accuracy
closeness of agreement between a test result and the accepted reference value
Note 1 to entry: A “test result” constitutes the observed values of a pitch (3.11) of a CRM (3.6) obtained by the
procedure outlined in this International Standard.
Note 2 to entry: The term “accepted reference value” is a value certified by a national or an international
calibrating laboratory. There will be an uncertainty associated with this value which should also appear on the
certificate.
Note 3 to entry: Accuracy and precision are different. Precision is defined as the closeness of agreement between
independent test results obtained under stipulated conditions. See ISO 5725-1.
4 Image magnification
4.1 Scale marker
To indicate magnification, superimpose on the image a scale marker and the corresponding length, in
SI units, that it actually represents on the sp
...
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