ISO 16700:2016

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.

Analyse par microfaisceaux — Microscopie électronique à balayage — Lignes directrices pour l'étalonnage du grandissement d'image

General Information

• Status: Published
• Publication Date: 17-Jul-2016
• ICS: 37.020 - Optical equipment
• Technical Committee: ISO/TC 202/SC 4 - Scanning electron microscopy
• Drafting Committee: ISO/TC 202/SC 4 - Scanning electron microscopy
• Current Stage: 9093 - International Standard confirmed
• Completion Date: 23-Nov-2023

Relations

• Revises: ISO 16700:2004 - Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
• Effective Date: 23-Nov-2013

Standards Content (Sample)

DRAFT INTERNATIONAL STANDARD
ISO/DIS 16700
ISO/TC 202/SC 4 Secretariat: JISC
Voting begins on: Voting terminates on:
2015-09-17 2015-12-16
Microbeam analysis — Scanning electron microscopy —
Guidelines for calibrating image magnification
Analyse par microfaisceaux — Microscopie électronique à balayage — Lignes directrices pour l’étalonnage
du grandissement d’image
ICS: 37.020
THIS DOCUMENT IS A DRAFT CIRCULATED
FOR COMMENT AND APPROVAL. IT IS
THEREFORE SUBJECT TO CHANGE AND MAY
NOT BE REFERRED TO AS AN INTERNATIONAL
STANDARD UNTIL PUBLISHED AS SUCH.
IN ADDITION TO THEIR EVALUATION AS
BEING ACCEPTABLE FOR INDUSTRIAL,
TECHNOLOGICAL, COMMERCIAL AND
USER PURPOSES, DRAFT INTERNATIONAL
STANDARDS MAY ON OCCASION HAVE TO
BE CONSIDERED IN THE LIGHT OF THEIR
POTENTIAL TO BECOME STANDARDS TO
WHICH REFERENCE MAY BE MADE IN
Reference number
NATIONAL REGULATIONS.
ISO/DIS 16700:2015(E)
RECIPIENTS OF THIS DRAFT ARE INVITED
TO SUBMIT, WITH THEIR COMMENTS,
NOTIFICATION OF ANY RELEVANT PATENT
RIGHTS OF WHICH THEY ARE AWARE AND TO
©
PROVIDE SUPPORTING DOCUMENTATION. ISO 2015

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ISO/DIS 16700:2015(E) ISO/DIS 16700:2015(E)

Contents Page
Foreword . iv
Introduction . v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Image magnification . 3
4.1 Scale marker . 3
4.2 Expressing magnification . 3
5 Reference material . 4
5.1 General . 4
5.2 Requirements for CRM . 4
5.3 Pitch patterns on CRM . 4
5.4 Storage and handling . 4
6 Calibration procedures . 5
6.1 General . 5
6.2 Mounting CRM . 5
6.3 Setting SEM operation conditions for calibration . 5
6.4 Image recording . 6
6.5 Measurement of image . 6
6.6 Calibration of magnification and scale marker . 7
7 Accuracy of image magnification and scale marker . 8
8 Calibration report . 9
8.1 General . 9
8.2 Contents of calibration report . 9
Annex A (informative) Reference materials for magnification .
...

INTERNATIONAL ISO
STANDARD 16700
Second edition
2016-08-01
Microbeam analysis — Scanning
electron microscopy — Guidelines for
calibrating image magnification
Analyse par microfaisceaux — Microscopie électronique à balayage
— Lignes directrices pour l’étalonnage du grandissement d’image
Reference number
ISO 16700:2016(E)
©
ISO 2016

---------------------- Page: 1 ----------------------
ISO 16700:2016(E)

COPYRIGHT PROTECTED DOCUMENT
© ISO 2016, Published in Switzerland
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form
or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior
written permission. Permission can be requested from either ISO at the address below or ISO’s member body in the country of
the requester.
ISO copyright office
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[e-mail]
www.iso.org
ii © ISO 2016 – All rights reserved

---------------------- Page: 2 ----------------------
ISO 16700:2016(E)

Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Image magnification . 3
4.1 Scale marker . 3
4.2 Expressing magnification . 3
5 Reference material . 3
5.1 General . 3
5.2 Requirements for CRM . 4
5.3 Pitch patterns on CRM . 4
5.4 Storage and handling . 4
6 Calibration procedures . 5
6.1 General . 5
6.2 Mounting CRM . 5
6.3 Setting SEM operation conditions for calibration . 5
6.4 Image recording . 6
6.5 Measurement of image .
...