Piezoelectric sensors - Part 3: Physical sensors (IEC 63041-3:2020)

This part of IEC 63041 is applicable to piezoelectric physical sensors mainly used in the field
of process control, wireless monitoring, dynamics, thermodynamics, vacuum engineering, and
environmental sciences. This document provides users with technical guidelines as well as
basic knowledge of common physical sensors.
Piezoelectric sensors covered herein are those applied to the detection and measurement of
physical quantities such as force, pressure, torque, viscosity, temperature, film thickness,
acceleration, vibration, and tilt angle.

Piezoelektrische Sensoren - Teil 3: Physikalische Sensoren (IEC 63041-3:2020)

Capteurs piézoélectriques - Partie 3: Capteurs physiques (IEC 63041-3:2020)

L'IEC 63041-3:2020 s'applique aux capteurs physiques piézoélectriques principalement utilisés dans le domaine des commandes de processus, de la surveillance sans fil, de la dynamique, de la thermodynamique, des technologies du vide et des sciences environnementales. Le présent document donne aux utilisateurs des lignes directrices techniques ainsi que les connaissances de base concernant les capteurs physiques courants. Les capteurs piézoélectriques traités ici sont ceux appliqués à la détection et au mesurage des grandeurs physiques telles que la force, la pression, le couple, la viscosité, la température, l'épaisseur de film, l'accélération, les vibrations, et l'angle d'inclinaison.

Piezoelektrični senzorji - 3. del: Fizični senzorji (IEC 63041-3:2020)

General Information

Status
Published
Publication Date
08-Oct-2020
Technical Committee
Current Stage
6060 - National Implementation/Publication (Adopted Project)
Start Date
07-Oct-2020
Due Date
12-Dec-2020
Completion Date
09-Oct-2020

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SLOVENSKI STANDARD
SIST EN IEC 63041-3:2020
01-december-2020
Piezoelektrični senzorji - 3. del: Fizični senzorji (IEC 63041-3:2020)
Piezoelectric sensors - Part 3: Physical sensors (IEC 63041-3:2020)
Piezoelektrische Sensoren - Teil 3: Physikalische Sensoren (IEC 63041-3:2020)
Capteurs piézoélectriques - Partie 3: Capteurs physiques (IEC 63041-3:2020)
Ta slovenski standard je istoveten z: EN IEC 63041-3:2020
ICS:
31.140 Piezoelektrične naprave Piezoelectric devices
SIST EN IEC 63041-3:2020 en

2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

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SIST EN IEC 63041-3:2020
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SIST EN IEC 63041-3:2020
EUROPEAN STANDARD EN IEC 63041-3
NORME EUROPÉENNE
EUROPÄISCHE NORM
September 2020
ICS 31.140
English Version
Piezoelectric sensors - Part 3: Physical sensors
(IEC 63041-3:2020)

Capteurs piézoélectriques - Partie 3: Capteurs physiques Piezoelektrische Sensoren - Teil 3: Physikalische Sensoren

(IEC 63041-3:2020) (IEC 63041-3:2020)

This European Standard was approved by CENELEC on 2020-09-16. CENELEC members are bound to comply with the CEN/CENELEC

Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration.

Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC

Management Centre or to any CENELEC member.

This European Standard exists in three official versions (English, French, German). A version in any other language made by translation

under the responsibility of a CENELEC member into its own language and notified to the CEN-CENELEC Management Centre has the

same status as the official versions.

CENELEC members are the national electrotechnical committees of Austria, Belgium, Bulgaria, Croatia, Cyprus, the Czech Republic,

Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, the

Netherlands, Norway, Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland,

Turkey and the United Kingdom.
European Committee for Electrotechnical Standardization
Comité Européen de Normalisation Electrotechnique
Europäisches Komitee für Elektrotechnische Normung
CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels

© 2020 CENELEC All rights of exploitation in any form and by any means reserved worldwide for CENELEC Members.

Ref. No. EN IEC 63041-3:2020 E
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SIST EN IEC 63041-3:2020
EN IEC 63041-3:2020 (E)
European foreword

The text of document 49/1333/CDV, future edition 1 of IEC 63041-3, prepared by IEC/TC 49

"Piezoelectric, dielectric and electrostatic devices and associated materials for frequency control,

selection and detection" was submitted to the IEC-CENELEC parallel vote and approved by

CENELEC as EN IEC 63041-3:2020.
The following dates are fixed:

• latest date by which the document has to be implemented at national (dop) 2021-06-16

level by publication of an identical national standard or by endorsement

• latest date by which the national standards conflicting with the (dow) 2023-09-16

document have to be withdrawn

Attention is drawn to the possibility that some of the elements of this document may be the subject of

patent rights. CENELEC shall not be held responsible for identifying any or all such patent rights.

Endorsement notice

The text of the International Standard IEC 63041-3:2020 was approved by CENELEC as a European

Standard without any modification.

In the official version, for Bibliography, the following notes have to be added for the standards

indicated:
IEC 60068 (series) NOTE Harmonized as EN 60068 (series)
IEC 60122-1 NOTE Harmonized as EN 60122-1
IEC 60444-1 NOTE Harmonized as EN 60444-1
IEC 60444-5 NOTE Harmonized as EN 60444-5
IEC 60444-9 NOTE Harmonized as EN 60444-9
IEC 60679 (series) NOTE Harmonized as EN 60679 (series)
IEC 60758:2016 NOTE Harmonized as EN 60758:2016 (not modified)
IEC 60862-1 NOTE Harmonized as EN 60862-1
IEC 61019-1 NOTE Harmonized as EN 61019-1
IEC 61240:2016 NOTE Harmonized as EN 61240:2017 (not modified)
IEC 61760 (series) NOTE Harmonized as EN 61760 (series)
IEC 61837 (series) NOTE Harmonized as EN 61837 (series)
IEC 62276:2016 NOTE Harmonized as EN 62276:2016 (not modified)
ISO/IEC 17025 NOTE Harmonized as EN ISO/IEC 17025
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SIST EN IEC 63041-3:2020
EN IEC 63041-3:2020 (E)
Annex ZA
(normative)
Normative references to international publications with their
corresponding European publications

The following documents are referred to in the text in such a way that some or all of their content

constitutes requirements of this document. For dated references, only the edition cited applies. For

undated references, the latest edition of the referenced document (including any amendments)

applies.

NOTE 1 Where an International Publication has been modified by common modifications, indicated by (mod),

the relevant EN/HD applies.

NOTE 2 Up-to-date information on the latest versions of the European Standards listed in this annex is available

here: www.cenelec.eu.
Publication Year Title EN/HD Year
IEC 60027 series Letters symbols to be used in electrical - -
technology
IEC 60050-561 - International Electrotechnical Vocabulary - - -
Part 561: Piezoelectric, dielectric and
electrostatic devices and associated
materials for frequency control, selection
and detection
IEC 60617-DB 2012 Graphical symbols for diagrams - -
IEC 63041-1 2017 Piezoelectric sensors - Part 1: Generic EN IEC 63041-1 2018
specifications
IEC 63041-2 - Piezoelectric sensors - Part 2: Chemical EN IEC 63041-2 -
and biochemical sensors
ISO 80000-1 - Quantities and units - Part 1: General EN ISO 80000-1 -
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SIST EN IEC 63041-3:2020
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SIST EN IEC 63041-3:2020
IEC 63041-3
Edition 1.0 2020-08
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
Piezoelectric sensors –
Part 3: Physical sensors
Capteurs piézoélectriques –
Partie 3: Capteurs physiques
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
INTERNATIONALE
ICS 31.140 ISBN 978-2-8322-8742-2

Warning! Make sure that you obtained this publication from an authorized distributor.

Attention! Veuillez vous assurer que vous avez obtenu cette publication via un distributeur agréé.

® Registered trademark of the International Electrotechnical Commission
Marque déposée de la Commission Electrotechnique Internationale
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SIST EN IEC 63041-3:2020
– 2 – IEC 63041-3:2020 © IEC 2020
CONTENTS

FOREWORD ........................................................................................................................... 3

1 Scope .............................................................................................................................. 5

2 Normative references ...................................................................................................... 5

3 Terms, definitions, symbols and units .............................................................................. 5

3.1 Terms and definitions .............................................................................................. 5

3.2 Symbols and units................................................................................................... 6

4 Specifications .................................................................................................................. 6

4.1 General ................................................................................................................... 6

4.2 Conceptual diagrams of sensor types...................................................................... 6

4.2.1 General ........................................................................................................... 6

4.2.2 Conceptual diagram for sensor elements of SAW resonator type ..................... 7

4.2.3 Conceptual diagram for sensor elements of SAW delay-line type ..................... 7

4.3 Technical documents .............................................................................................. 8

5 Delivery conditions .......................................................................................................... 8

6 Quality and reliability ....................................................................................................... 8

7 Test and measurement procedures .................................................................................. 8

Annex A (informative) Physical reaction in sensor cell and detection method ......................... 9

A.1 Detection and measurement ................................................................................... 9

A.2 Typical formulae for detection methods of physical quantity .................................... 9

A.2.1 General ........................................................................................................... 9

A.2.2 Non-acoustic type ............................................................................................ 9

A.2.3 Acoustic type ................................................................................................. 10

A.2.4 Delay-line type............................................................................................... 11

A.3 Calibration ............................................................................................................ 11

Bibliography .......................................................................................................................... 12

Figure 1 – Conceptual diagram for SAW single resonator type ................................................ 7

Figure 2 – Conceptual diagram for SAW differential resonator type ......................................... 7

Figure 3 – Conceptual diagram for SAW transmission (two-port) delay-line type ..................... 7

Figure 4 – Conceptual diagram for SAW reflective (one-port) delay-line type .......................... 8

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SIST EN IEC 63041-3:2020
IEC 63041-3:2020 © IEC 2020 – 3 –
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
PIEZOELECTRIC SENSORS –
Part 3: Physical sensors
FOREWORD

1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising

all national electrotechnical committees (IEC National Committees). The object of IEC is to promote

international co-operation on all questions concerning standardization in the electrical and electronic fields. To

this end and in addition to other activities, IEC publishes International Standards, Technical Specifications,

Technical Reports, Publicly Available Specifications (PAS) and Guides (hereafter referred to as “IEC

Publication(s)”). Their preparation is entrusted to technical committees; any IEC National Committee interested

in the subject dealt with may participate in this preparatory work. International, governmental and non-

governmental organizations liaising with the IEC also participate in this preparation. IEC collaborates closely

with the International Organization for Standardization (ISO) in accordance with conditions determined by

agreement between the two organizations.

2) The formal decisions or agreements of IEC on technical matters express, as nearly as possible, an international

consensus of opinion on the relevant subjects since each technical committee has representation from all

interested IEC National Committees.

3) IEC Publications have the form of recommendations for international use and are accepted by IEC National

Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC

Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any

misinterpretation by any end user.

4) In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications

transparently to the maximum extent possible in their national and regional publications. Any divergence

between any IEC Publication and the corresponding national or regional publication shall be clearly indicated in

the latter.

5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity

assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any

services carried out by independent certification bodies.

6) All users should ensure that they have the latest edition of this publication.

7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and

members of its technical committees and IEC National Committees for any personal injury, property damage or

other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and

expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC

Publications.

8) Attention is drawn to the Normative references cited in this publication. Use of the referenced publications is

indispensable for the correct application of this publication.

9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of

patent rights. IEC shall not be held responsible for identifying any or all such patent rights.

International Standard IEC 63041-3 has been prepared by IEC technical committee TC 49:

Piezoelectric, dielectric and electrostatic devices and associated materials for frequency

control, selection and detection.
The text of this International Standard is based on the following documents:
CDV Report on voting
49/1333/CDV 49/1343/RVC

Full information on the voting for the approval of this International Standard can be found in

the report on voting indicated in the above table.

This document has been drafted in accordance with the ISO/IEC Directives, Part 2.

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SIST EN IEC 63041-3:2020
– 4 – IEC 63041-3:2020 © IEC 2020

A list of all part in the IEC 63041 series, published under the general title Piezoelectric

sensors, can be found on the IEC website.

The committee has decided that the contents of this document will remain unchanged until the

stability date indicated on the IEC website under "http://webstore.iec.ch" in the data related to

the specific document. At this date, the document will be
• reconfirmed,
• withdrawn,
• replaced by a revised edition, or
• amended.
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SIST EN IEC 63041-3:2020
IEC 63041-3:2020 © IEC 2020 – 5 –
PIEZOELECTRIC SENSORS –
Part 3: Physical sensors
1 Scope

This part of IEC 63041 is applicable to piezoelectric physical sensors mainly used in the field

of process control, wireless monitoring, dynamics, thermodynamics, vacuum engineering, and

environmental sciences. This document provides users with technical guidelines as well as

basic knowledge of common physical sensors.

Piezoelectric sensors covered herein are those applied to the detection and measurement of

physical quantities such as force, pressure, torque, viscosity, temperature, film thickness,

acceleration, vibration, and tilt angle.
2 Normative references

The following documents are referred to in the text in such a way that some or all of their

content constitutes requirements of this document. For dated references, only the edition

cited applies. For undated references, the latest edition of the referenced document (including

any amendments) applies.
IEC 60027 (all parts), Letter symbols to be used in electrical technology

IEC 60050-561, International electrotechnical vocabulary – Part 561: Piezoelectric, dielectric

and electrostatic devices and associated materials for frequency control, selection and

detection
IEC 60617:2012, Graphical symbols for diagrams (database available at
http://std.iec.ch/iec60617)
IEC 63041-1:2017, Piezoelectric sensors – Part 1: Generic specifica
...

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