SIST EN ISO 18452:2016
(Main)Fine ceramics (advanced ceramics, advanced technical ceramics) - Determination of thickness of ceramic films by contact-probe profilometer (ISO 18452:2005)
Fine ceramics (advanced ceramics, advanced technical ceramics) - Determination of thickness of ceramic films by contact-probe profilometer (ISO 18452:2005)
This International Standard specifies a method for the determination of the film thickness of a fine ceramic film and ceramic coatings by a contact-probe profilometer. The method is suitable for film thicknesses in the range of 10 nm to 10 000 nm.
Hochleistungskeramik - Bestimmung der Dicke keramischer Schichten mit einem Kontaktprofilometer (ISO 18452:2005)
Diese Internationale Norm legt ein Verfahren zur Bestimmung der Schichtdicke feinkeramischer Schichten und keramischer Beschichtungen mit einem Kontaktprofilometer fest. Das Verfahren ist für Schichtdicken im Bereich von 10 nm bis 10 000 nm geeignet.
ANMERKUNG Das Verfahren erfordert eine ausgeprägte und deutlich geformte Grenze zwischen beschichtetem und unbeschichtetem Bereich des Grundwerkstoffes (Substrat).
Céramiques techniques - Détermination de l'épaisseur des films céramiques avec un profilomètre à contact (ISO 18452:2005)
L'ISO 18452 :2005 spécifie une méthode permettant de déterminer l'épaisseur d'un film céramique technique et de revêtements céramiques à l'aide d'un profilomètre à contact. La méthode est adaptée à des épaisseurs de film comprises entre 10 nm et 10 000 nm.
NOTE La méthode nécessite une frontière distincte et clairement formée entre les parties revêtue et non revêtue du substrat.
Fina keramika (sodobna keramika, sodobna tehnična keramika) - Ugotavljanje debeline keramične plasti z merilnikom profilov (ISO 18452:2005)
Ta mednarodni standard podaja metodo za ugotavljanje debeline fine keramične plasti in keramičnih prevlek z merilnikom profilov. Metoda je primerna za debelino plasti v razponu od 10 nm do 10.000 nm.
General Information
Relations
Standards Content (Sample)
SLOVENSKI STANDARD
SIST EN ISO 18452:2016
01-junij-2016
1DGRPHãþD
SIST EN 1071-1:2004
)LQDNHUDPLND VRGREQDNHUDPLNDVRGREQDWHKQLþQDNHUDPLND 8JRWDYOMDQMH
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Fine ceramics (advanced ceramics, advanced technical ceramics) - Determination of
thickness of ceramic films by contact-probe profilometer (ISO 18452:2005)
Hochleistungskeramik - Bestimmung der Dicke keramischer Schichten mit einem
Kontaktprofilometer (ISO 18452:2005)
Céramiques techniques - Détermination de l'épaisseur des films céramiques avec un
profilomètre à contact (ISO 18452:2005)
Ta slovenski standard je istoveten z: EN ISO 18452:2016
ICS:
25.220.99 Druge obdelave in prevleke Other treatments and
coatings
81.060.30 Sodobna keramika Advanced ceramics
SIST EN ISO 18452:2016 en
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
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SIST EN ISO 18452:2016
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SIST EN ISO 18452:2016
EN ISO 18452
EUROPEAN STANDARD
NORME EUROPÉENNE
April 2016
EUROPÄISCHE NORM
ICS 81.060.30 Supersedes EN 1071-1:2003
English Version
Fine ceramics (advanced ceramics, advanced technical
ceramics) - Determination of thickness of ceramic films by
contact-probe profilometer (ISO 18452:2005)
Céramiques techniques - Détermination de l'épaisseur Hochleistungskeramik - Bestimmung der Dicke
des films céramiques avec un profilomètre à contact keramischer Schichten mit einem Kontaktprofilometer
(ISO 18452:2005) (ISO 18452:2005)
This European Standard was approved by CEN on 25 March 2016.
CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this
European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references
concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN
member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by
translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management
Centre has the same status as the official versions.
CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania,
Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and
United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels
© 2016 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 18452:2016 E
worldwide for CEN national Members.
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SIST EN ISO 18452:2016
EN ISO 18452:2016 (E)
Contents Page
European foreword . 3
2
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SIST EN ISO 18452:2016
EN ISO 18452:2016 (E)
European foreword
The text of ISO 18452:2005 has been prepared by Technical Committee ISO/TC 206 “Fine ceramics” of
the International Organization for Standardization (ISO) and has been taken over as EN ISO 18452:2016
by Technical Committee CEN/TC 184 “Advanced technical ceramics” the secretariat of which is held by
DIN.
This European Standard shall be given the status of a national standard, either by publication of an
identical text or by endorsement, at the latest by October 2016, and conflicting national standards shall
be withdrawn at the latest by October 2016.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN [and/or CENELEC] shall not be held responsible for identifying any or all such patent
rights.
This document supersedes EN 1071-1:2003.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,
Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia,
France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta,
Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland,
Turkey and the United Kingdom.
Endorsement notice
The text of ISO 18452:2005 has been approved by CEN as EN ISO 18452:2016 without any modification.
3
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SIST EN ISO 18452:2016
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SIST EN ISO 18452:2016
INTERNATIONAL ISO
STANDARD 18452
First edition
2005-11-15
Fine ceramics (advanced ceramics,
advanced technical ceramics) —
Determination of thickness of ceramic
films by contact-probe profilometer
Céramiques techniques — Détermination de l'épaisseur des films
céramiques avec un profilomètre à contact
Reference number
ISO 18452:2005(E)
© ISO 2005
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SIST EN ISO 18452:2016
ISO 18452:2005(E)
PDF disclaimer
This PDF file may contain embedded typefaces. In accordance with Adobe's licensing policy, this file may be printed or viewed but shall
not be edited unless the typefaces which are embedded are licensed to and installed on the computer performing the editing. In
downloading this file, parties accept therein the responsibility of not infringing Adobe's licensing policy. The ISO Central Secretariat
accepts no liability in this area.
Adobe is a trademark of Adobe Systems Incorporated.
Details of the software products used to create this PDF file can be found in the General Info relative to the file; the PDF-creation
parameters were optimized for printing. Every care has been taken to ensure that the file is suitable for use by ISO member bodies. In the
unlikely event that a problem relating to it is found, please inform the Central Secretariat at the address given below.
© ISO 2005
All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means,
electronic or mechanical, including photocopying and microfilm, without permission in writing from either ISO at the address below or
ISO's member body in the country of the requester.
ISO copyright office
Case postale 56 CH-1211 Geneva 20
Tel. + 41 22 749 01 11
Fax + 41 22 749 09 47
E-mail copyright@iso.org
Web www.iso.org
Published in Switzerland
©
ii ISO 2005 – All rights reserved
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SIST EN ISO 18452:2016
ISO 18452:2005(E)
Contents Page
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Principle of measurement . 1
5 Test environment . 1
6 Apparatus . 2
7 Test pieces . 3
8 Procedure . 4
9 Calculation . 5
10 Limits to step height . 5
11 Test report . 6
Annex A (informative) Effect of amplification factor and levelling error on measured layer thickness 7
©
ISO 2005 – All rights reserved iii
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SIST EN ISO 18452:2016
ISO 18452:2005(E)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards bodies
(ISO member bodies). The work of preparing International Standards is normally carried out through ISO
technical committees. Each member body interested in a subject for which a technical committee has been
established has the right to be represented on that committee. International organizations, governmental and
non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the International
Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part 2.
The main task of technical committees is to prepare International Standards. Draft International Standards
adopted by the technical committees are circulated to the member bodies for voting. Publication as an
International Standard requires approval by at least 75 % of the member bodies casting a vote.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. ISO shall not be held responsible for identifying any or all such patent rights.
ISO 18452 was prepared by Technical Committee ISO/TC 206, Fine ceramics.
©
iv ISO 2005 – All rights reserved
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SIST EN ISO 18452:2016
INTERNATIONAL STANDARD ISO 18452:2005(E)
Fine ceramics (advanced ceramics, advanced technical
ceramics) — Determination of thickness of ceramic films by
contact-probe profilometer
1 Scope
This International Standard specifies a method for the determination of the film thickness of a fine ceramic film
and ceramic coatings by a contact-probe profilometer. The method is suitable for film thicknesses in the range
of 10 nmto 10 000 nm.
NOTE The method requires a distinct and clearly formed boundary between coated and uncoated parts of the substrate.
2 Normative references
The following referenced documents are indispensable for the application of this document. For dated
references, only the edition cited applies. For undated references, the latest edition of the referenced document
(including any amendments) applies.
ISO 3274, Geometrical Product Specifications (GPS)— Surface texture: Profile method— Nominal
characteristics of contact (stylus) instruments
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
3.1
fine ceramic film
coating consisting of a fine ceramic material which thinly covers the substrate surface
EXAMPLE Typical materials are oxides, carbides, nitrides, etc., deposited by methods such as vacuum evaporating,
sputtering, chemical vapour deposition, etc.
4 Principle of measurement
This International Standard concerns the measurement of the film thickness of fine ceramic coatings on a
substrate using a contact-probe profilometer. The film thickness shall be calculated from the profile which is
obtained by scanning the contact probe in the direction C→ B→ A, as shown in Figure 1. The pro
...
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.WDYOMDQMHHochleistungskeramik - Bestimmung der Dicke keramischer Schichten mit einem Kontaktprofilometer (ISO 18452:2005)Céramiques techniques - Détermination de l'épaisseur des films céramiques avec un profilomètre à contact (ISO 18452:2005)Fine ceramics (advanced ceramics, advanced technical ceramics) - Determination of thickness of ceramic films by contact-probe profilometer (ISO 18452:2005)81.060.30Sodobna keramikaAdvanced ceramics25.220.99Druge obdelave in prevlekeOther treatments and coatingsICS:Ta slovenski standard je istoveten z:FprEN ISO 18452kSIST FprEN ISO 18452:2015en01-november-2015kSIST FprEN ISO 18452:2015SLOVENSKI
STANDARD
kSIST FprEN ISO 18452:2015
EUROPEAN STANDARD NORME EUROPÉENNE EUROPÄISCHE NORM
FINAL DRAFT
FprEN ISO 18452
September
t r s w ICS
z sä r x rä u r Will supersede EN
s r y sæ sã t r r uEnglish Version
Céramiques techniques æ Détermination de l 5épaisseur des films céramiques avec un profilomètre à contact
Hochleistungskeramik æ Bestimmung der Dicke keramischer Schichten mit einem Kontaktprofilometer This draft European Standard is submitted to CEN members for unique acceptance procedureä It has been drawn up by the
If this draft becomes a European Standardá CEN members are bounwhich stipulate the conditions for giving this European Standard the status of a national standard without any alterationä
This draft European Standard was established by CEN in three ofer language made by translation under the responsibility of a CEN member into its own language and notified to the CENæCENELEC Management Centre has the same status as the official versionsä
CEN members are the national standards bodies of Austriaá Belgiumá Bulgariaá Croatiaá Cyprusá Czech Republicá Denmarká Estoniaá Finlandá Former Yugoslav Republic of Macedoniaá Franceá Germanyá Greeceá Hungaryá Icelandá Irelandá Italyá Latviaá Lithuaniaá Luxembourgá Maltaá Netherlandsá Norwayá Polandá Portugalá Romaniaá Slovakiaá Sloveniaá Spainá Swedená Switzerlandá Turkey and United Kingdomä
Recipients of this draft are invited to submitá with their commentsá notification of any relevant patent rights of which they are aware and to provide supporting documentationä
Warning ã This document is not a European Standardä It is distributed for review and commentsä It is subject to change without notice and shall not be referred to as a European Standardä
EUROPEAN COMMITTEE FOR STANDARDIZATION COMITÉ EUROPÉEN DE NORMALISATION EUROPÄISCHES KOMITEE FÜR NORMUNG
CEN-CENELEC Management Centre:
Avenue Marnix 17,
B-1000 Brussels
9
t r s w CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national Membersä Refä Noä FprEN ISO
s z v w tã t r s w EkSIST FprEN ISO 18452:2015
FprEN ISO 18452:2015 (E) 2 Contents
Page European foreword . 3
kSIST FprEN ISO 18452:2015
FprEN ISO 18452:2015 (E) 3 European foreword The text of ISO 18452:2005 has been prepared by Technical Committee ISO/TC 206 “Fine ceramics” of the International Organization for Standardization (ISO) and has been taken over as FprEN ISO 18452:2015 by Technical Committee CEN/TC 184 “Advanced technical ceramics” the secretariat of which is held by DIN. This document is currently submitted to the Unique Acceptance Procedure. This document will supersede EN 1071-1:2003. Endorsement notice The text of ISO 18452:2005 has been approved by CEN as FprEN ISO 18452:2015 without any modification. kSIST FprEN ISO 18452:2015
kSIST FprEN ISO 18452:2015
INTERNATIONALSTANDARDISO18452First edition2005-11-15Reference numberISO18452:2005(E)© ISO2005Fine ceramics (advanced ceramics, advanced technical ceramics)— Determination of thickness of ceramic films by contact-probe profilometerCéramiques techniques— Détermination de l'épaisseur des films céramiques avec un profilomètre à contact
kSIST FprEN ISO 18452:2015
ISO18452:2005(E)ii© ISO2005–All rights reservedPDF disclaimerThis PDF file may contain embedded typefaces. In accordance with Adobe's licensing policy, this file may be printed or viewed but shallnot be edited unless the typefaces which are embedded are licensed to and installed on the computer performing the editing. Indownloading this file, parties accept therein the responsibility of not infringing Adobe's licensing policy. The ISO Central Secretariataccepts no liability in this area.Adobe is a trademark of Adobe Systems Incorporated.Details of the software products used to create this PDF file can be found in the General Info relative to the file; the PDF-creationparameters were optimized for printing. Every care has been taken to ensure that the file is suitable for use by ISO member bodies. In theunlikely event that a problem relating to it is found, please inform the Central Secretariat at the address given below.©ISO2005All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means,electronic or mechanical, including photocopying and microfilm, without permission in writing from either ISO at the address below orISO's member body in the country of the requester.ISO copyright officeCase postale 56 CH-1211 Geneva 20Tel.+ 41 22 749 01 11Fax+ 41 22 749 09 47E-mailcopyright@iso.orgWebwww.iso.orgPublished in SwitzerlandkSIST FprEN ISO 18452:2015
ISO18452:2005(E)© ISO2005–All rights reservediiiContents Page1Scope . 12Normative references . 13Terms and definitions . 14Principle of measurement . 15Test environment . 16Apparatus . 27Test pieces . 38Procedure . 49Calculation . 510Limits to step height . 511Test report . 6AnnexA(informative)Effect of amplification factor and levelling error on measured layer thickness
7kSIST FprEN ISO 18452:2015
ISO18452:2005(E)iv© ISO2005–All rights reservedForewordISO (the International Organization for Standardization) is a worldwide federation of national standards bodies(ISO member bodies). The work of preparing International Standards is normally carried out through ISOtechnical committees. Each member body interested in a subject for which a technical committee has beenestablished has the right to be represented on that committee. International organizations, governmental andnon-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely with the InternationalElectrotechnical Commission (IEC) on all matters of electrotechnical standardization.International Standards are drafted in accordance with the rules given in the ISO/IEC Directives, Part2.The main task of technical committees is to prepare International Standards. Draft International Standardsadopted by the technical committees are circulated to the member bodies for voting. Publication as anInternational Standard requires approval by at least 75% of the member bodies casting a vote.Attention is drawn to the possibility that some of the elements of this document may be the subject of patentrights. ISO shall not be held responsible for identifying any or all such patent rights.ISO18452 was prepared by Technical Committee ISO/TC206, Fine ceramics.kSIST FprEN ISO 18452:2015
INTERNATIONAL STANDARDISO18452:2005(E)© ISO2005–All rights reserved1Fine ceramics (advanced ceramics, advanced technical ceramics)— Determination of thickness of ceramic films by contact-probe profilometer1ScopeThis International Standard specifies a method for the determination of the film thickness of a fine ceramic filmand ceramic coatings by a contact-probe profilometer. The method is suitable for film thicknesses in the rangeof
to .NOTEThe method requires a distinct and clearly formed boundary between coated and uncoated parts of the substrate.2Normative referencesThe following referenced documents are indispensable for the application of this document. For datedreferences, only the edition cited applies. For undated references, the latest edition of the referenced document(including any amendments) applies.ISO3274, Geometrical Product Specifications (GPS)— Surface texture: Profile method— Nominalcharacteristics of contact (stylus) instruments3Terms and definitionsFor the purposes of this document, the following terms and definitions apply.3.1 fine ceramic filmcoating consisting of a fine ceramic material which thinly covers the substrate surfaceEXAMPLETypical materials are oxides, carbides, nitrides, etc., deposited by methods such as vacuum evaporating,sputtering, chemical vapour deposition, etc.4Principle of measurementThis International Standard concerns the measurement of the film thickness of fine ceramic coatings on asubstrate using a contact-probe profilometer. The film thickness shall be calculated from the profile which isobtained by scanning the contact probe in the direction , as shown in Figure1. The profile is inproportion to the difference in height between the parts covered and not covered with the fine ceramic film.5Test environmentThe test shall be carried out in an environment free from mechanical vibrations that may affect themeasurement.10nm10000nmC→B→AkSIST FprEN ISO 18452:2015
ISO18452:2005(E)2© ISO2005–All rights reserved6Apparatus6.1Contact-probe profilometerThe contact-probe profilometer shall be in accordance with ISO3274. The instrument shall
...
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