This document defines the most important quantities that characterize an energy-dispersive X‑ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This document is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This document specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309[2] and ASTM E1508[3] and is outside the scope of this document.

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  • Draft
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This document specifies specimen preparation methods for the analysis of particles in powders using energy-dispersive spectrometers (EDS) or wavelength-dispersive spectrometers (WDS) installed on an EPMA or SEM. The preparation methods for powder particle analysis are classified by the analytical purpose and the particle size. This document applies to inorganic particles larger than 100 nm and smaller than 100 µm in diameter. It applies only to analysis of "general" powders, which means that it excludes procedures for special applications such as forensic or trace analysis.

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ISO 22489:2016 specifies requirements for the quantification of elements in a micrometre-sized volume of a specimen identified through analysis of the X-rays generated by an electron beam using a wavelength dispersive spectrometer (WDS) fitted either to an electron probe microanalyser or to a scanning electron microscope (SEM). ISO 22489:2016 also describes the following: - the principle of the quantitative analysis; - the general coverage of this technique in terms of elements, mass fractions and reference specimens; - the general requirements for the instrument; - the fundamental procedures involved such as specimen preparation, selection of experimental conditions, the measurements, the analysis of these and the report. ISO 22489:2016 is intended for the quantitative analysis of a flat and homogeneous bulk specimen using a normal incidence beam. It does not specify detailed requirements for either the instruments or the data reduction software. Operators should obtain information such as installation conditions, detailed procedures for operation and specification of the instrument from the makers of any products used.

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ISO 14595:2014 gives recommendations for single-phase certified reference materials (CRMs) used in electron probe microanalysis (EPMA). It also provides guidance on the use of CRMs for the microanalysis of flat, polished specimens. It does not cover organic or biological materials.

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ISO 17470:2014 gives guidance for the identification of elements and the investigation of the presence of specific elements within a specific volume (on a μm3 scale) contained in a specimen, by analysing X-ray spectra obtained using wavelength dispersive X-ray spectrometers on an electron probe microanalyser or on a scanning electron microscope.

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ISO 23833:2013 defines terms used in the practices of electron probe microanalysis (EPMA). It covers both general and specific concepts classified according to their hierarchy in a systematic order. ISO 23833:2013 is applicable to all standardization documents relevant to the practices of EPMA. In addition, some parts of ISO 23833:2013 are applicable to those documents relevant to the practices of related fields (SEM, AEM, EDX, etc.) for definition of those terms common to them.

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ISO 22029:2012 presents a simple format for the exchange of digital spectral data that has been designated as an EMSA/MAS standard. This format is readable by both humans and computers and is suitable for transmission through various electronic networks, the phone system (with modems) or on physical computer storage devices (such as removable media). The format is not tied to any one computer, programming language or computer operating system. The adoption of a standard format would enable different laboratories to freely exchange spectral data, and would help to standardize data analysis software. If equipment manufacturers were to support a common format, the microscopy and microanalysis community would avoid duplicated effort in writing data analysis software.

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ISO 22309:2011 gives guidance on the quantitative analysis at specific points or areas of a specimen using energy-dispersive spectrometry (EDS) fitted to a scanning electron microscope or an electron probe microanalyser; any expression of amount, i.e. in terms of percent (mass fraction), as large/small or major/minor amounts is deemed to be quantitative. The correct identification of all elements present in the specimen is a necessary part of quantitative analysis and is therefore considered in ISO 22309. ISO 22309 provides guidance on the various approaches and is applicable to routine quantitative analysis of mass fractions down to 1 %, utilizing either reference materials or "standardless" procedures. It can be used with confidence for elements with atomic number Z > 10. Guidance on the analysis of light elements with Z

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This International Standard defines the most important quantities that characterize an energy-dispersive X-ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This International Standard is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This International Standard specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309[2] and ASTM E1508[3] and is outside the scope of this International Standard.

  • Standard
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ISO 22489:2006 specifies requirements for the quantification of elements in a micrometre-sized volume of a specimen identified through analysis of the X-rays generated by an electron beam using wavelength-dispersive spectrometers fitted either to an electron probe microanalyser or to a scanning electron microscope. It describes the principle of the quantitative analysis, the general coverage of this technique in terms of elements, mass fractions and reference specimens, the general requirements for the instrument, and the fundamental procedures involved, such as specimen preparation, selection of experimental conditions, the measurements, the analysis of these and the report. It is intended for the quantitative analysis of a flat and homogeneous bulk specimen using a normal incidence beam. It does not specify detailed requirements for either the instruments or the data reduction software. Operators should obtain information such as installation conditions, detailed procedures for operation and specification of the instrument from the makers of any products used.

  • Standard
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  • Standard
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ISO 22309:2006 gives guidance on the quantitative analysis at specific points or areas of a specimen using energy-dispersive spectrometry (EDS) fitted to a scanning electron microscope (SEM) or electron probe microanalyser (EPMA); any expression of amount, i.e. in terms of percent (mass fraction), as large/small or major/minor amounts is deemed to be quantitative. The correct identification of all elements present in the specimen is a necessary part of quantitative analysis and is therefore considered in ISO 22309:2006. ISO 22309:2006 provides guidance on the various approaches and is applicable to routine quantitative analysis of mass fractions down to 1 %, utilising either reference materials or standardless procedures. It can be used with confidence for elements with atomic number Z greater than 10. Guidance on the analysis of light elements with Z less than 11 is also given.

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ISO 17470:2004 gives guidance for the identification of elements and the investigation of the presence of specific elements, within a specific volume, contained in a specimen, by analysing X-ray spectra obtained using wavelength dispersive X-ray spectrometers on an electron probe microanalyser or on a scanning electron microscope.

  • Standard
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  • Standard
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ISO 22029:2003 presents a simple format for the exchange of digital spectral data that has been designated as an EMSA/MAS standard. This format is readable by both humans and computers and is suitable for transmission through various electronic networks (BITNET, ARPANET), the phone system (with modems) or on physical computer storage devices (such as floppy disks). The format is not tied to any one computer, programming language or computer operating system.

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ISO 14595:2003 has been developed to facilitate international exchange and compatibility of analysis data in electron probe microanalysis (EPMA). It gives guidance on evaluating and selecting reference materials (RMs), on evaluating the extent of heterogeneity and stability of RMs and it gives recommendations for the determination of the chemical composition of RMs for production as EPMA certified reference materials. ISO 14595:2003 gives recommendations for single-phase certified reference materials (CRMs) used in electron probe microanalysis (EPMA). It also provides guidance on the use of CRMs for the microanalysis of flat, polished specimens. It does not cover organic or biological materials.

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ISO 15632 defines the most important quantities that characterize an energy dispersive X-ray spectrometer (EDS) consisting of a semiconductor detector, a pre-amplifier and a signal processing unit as the essential parts. This International Standard is only applicable to spectrometers with semiconductor detectors operating on the principle of solid state ionization. It specifies minimum requirements for such spectrometers attached to an electron probe microanalyser (EPMA) or a scanning electron microscope (SEM). Realization of the analysis is outside the scope of this International Standard.

  • Standard
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  • Standard
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