ASTM E1505-92(2001)

Standard Guide for Determining SIMS Relative Sensitivity Factors from Ion Implanted External Standards (Withdrawn 2010)

SCOPE
1.1 The purpose of this guide is to provide the secondary ion mass spectrometry (SIMS) analyst with two procedures for determining relative sensitivity factors (RSFs) from ion implanted external standards. This guide may be used for obtaining the RSFs of trace elements (
1.2 This guide does not describe procedures for obtaining RSFs for major elements (>1 atomic %). In addition, this guide does not describe procedures for obtaining RSFs from implants in heterogeneous (either laterally or in-depth) specimens.
1.3 The values stated in SI units are to be regarded as the standard.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
WITHDRAWN RATIONALE
The purpose of this guide is to provide the secondary ion mass spectrometry (SIMS) analyst with two procedures for determining relative sensitivity factors (RSFs) from ion implanted external standards.
Formerly under the jurisdiction of Committee E42 on Surface Analysis, this guide was withdrawn in February 2010 in accordance with section 10.5.3.1 of the Regulations Governing ASTM Technical Committees, which requires that standards shall be updated by the end of the eighth year since the last approval date.

General Information

• Status: Withdrawn
• Publication Date: 14-Nov-1992
• Withdrawal Date: 31-Jan-2010
• ICS: 11.040.40 - Implants for surgery, prosthetics and orthotics
• ICS: 71.040.50 - Physicochemical methods of analysis
• Technical Committee: E42 - Surface Analysis
• Drafting Committee: E42.06 - SIMS

Relations

• Replaces: ASTM E1505-92(1996) - Standard Guide for Determining SIMS Relative Sensitivity Factors from Ion Implanted External Standards
• Effective Date: 15-Nov-1992

Standards Content (Sample)

NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information.
Designation: E1505 – 92 (Reapproved 2001)
Standard Guide for
Determining SIMS Relative Sensitivity Factors from Ion
1
Implanted External Standards
This standard is issued under the fixed designation E1505; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope an ion implanted external standard. The beam is rastered or
defocussed in order to attempt to produce uniform current
1.1 Thepurposeofthisguideistoprovidethesecondaryion
density in the analyzed area, which is defined by means of
mass spectrometry (SIMS) analyst with two procedures for
mechanical or electronic gating. The intensities of the second-
determining relative sensitivity factors (RSFs) from ion im-
ary ions associated with the implanted element of interest and
planted external standards. This guide may be used for obtain-
areferenceelement(typically,amajorelementinthespecimen
ingtheRSFsoftraceelements(<1atomic%)inhomogeneous
matrix, which is distributed homogeneously in the specimen at
(chemically and structurally) specimens. This guide is useful
a known concentration) are monitored with respect to time
for all SIMS instruments.
during the ion sputtering.
1.2 This guide does not describe procedures for obtaining
4.2 AnRSFforagivenanalyteion, A,andagivenreference
RSFsformajorelements(>1atomic%).Inaddition,thisguide
ion, R,isequaltotheratiooftheirrespectiveusefulionyields,
doesnotdescribeproceduresforobtainingRSFsfromimplants
−1
t ·t ,where tequalsthenumberofionsdetecteddividedby
A R
in heterogeneous (either laterally or in-depth) specimens.
3
thenumberofcorrespondingatomssputtered (1-3). AnRSFis
1.3 The values stated in SI units are to be regarded as the
determined from the secondary ion intensity versus time data
standard.
obtainedfromimplantedstandardsusingoneoftwoarithmetic
1.4 This standard does not purport to address all of the
models described in the procedure (Section 7) of this guide.A
safety concerns, if any, associated with its use. It is the
measureoffinalcraterdepthisrequiredforRSFdetermination.
responsibility of the user of this standard to establish appro-
This measurement may be performed by another analytical
priate safety and health practices and determine the applica-
technique (see Section 7).
bility of regulatory limitations prior to use.
5. Significance and Use
2. Referenced Documents
2
5.1 The quantification of trace element compositions in
2.1 ASTM Standards:
homogeneousmatricesfromfirstprinciplesrequires(1)knowl-
E673 Terminology Relating to Surface Analysis
edgeofthefactorsinfluencingionandsputteringyieldsand(2)
3. Terminology
understanding of how instrumental parameters influence these
yields (1-3). This information is difficult to obtain. Therefore,
3.1 Definitions—See Terminology E673 for definitions of
SIMSoperatorscommonlyuseexternalstandardstodetermine
terms used in SIMS.
RSFs.TheseRSFsarethenusedtoquantifythecompositionof
4. Summary of Practice
trace elements in the specimen of interest through the applica-
tion of the following equation to each data point of the depth
4.1 This guide will allow calculation of the RSFs of trace
profile of interest (1-3).
elementsfromplotsofSIMSsecondaryionintensity(counts/s)
21
versus time (s) that are acquired during the sputtering of ion
C 5 I · C · ~I ·RSF· N! (1)
A A R R
implanted external standards. Briefly, these plots are obtained
where:
in the following manner: an ion beam of a particular ion
−3
C and C = concentrations (atoms-cm ) of the analyte
species, ion energy, and angle of incidence is used to bombard A R
and reference elements, respectively;
I and I = intensities (counts/s) obtained from the ana-
a R
1
lyte and reference ions, respectively; and
This guide is under the jurisdiction of ASTM Committee E42 on Surface
N = natural abundance (expressed as a fraction)
Analysis and is the direct responsibility of Subcommittee E42.06 on SIMS.
Current edition approved Oct. 10, 2001. Published January 1993. DOI: 10.1520/
of the analyte isotope being examined.
E1505-92R01.
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
contact ASTM Customer Service at [e-mail]. For Annual Book of ASTM
3
Standards volume information, refer to the standard’s Document Summary page on Theboldfacenumbersinparenthesesrefertothelistofreferencesattheendof
the ASTM website. this guide.
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E1505 – 92 (2001)
5.2 The most common method of creating external stan-
where:
−2
dards is to use an ion acceler
...