ASTM F980-92
(Guide)Guide for The Measurement of Rapid Annealing of Neutron-Induced Displacement Damage in Silicon Semiconductor Devices
Guide for The Measurement of Rapid Annealing of Neutron-Induced Displacement Damage in Silicon Semiconductor Devices
SCOPE
1.1 This guide defines the requirements and procedures for testing silicon discrete semiconductor devices and integrated circuits for rapid-annealing effects from displacement damage resulting from neutron radiation. This test will produce degradation of the electrical properties of the irradiated devices and should be considered a destructive test. Rapid annealing of displacement damage is usually associated with bipolar technologies.
1.2 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of whoever uses this standard to consult and establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard information is given in 4.2.7.
General Information
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Standard Guide for
The Measurement of Rapid Annealing of Neutron-induced
Displacement Damage in Silicon Semiconductor Devices'
This standard is issued under the fixed designation F 980; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.
1. Scope in the immediate vicinity of the irradiation location. All
rapid-annealing measurements are performed in situ because
1.1 This guide defines the requirements and procedures
measurement must begin immediately following irradiation
for testing silicon discrete semiconductor devices and inte-
(usually <1 ms).
grated circuits for rapid-annealing effects from displacement
3.1.2 remote tests-electrical measurements made on de-
damage resulting from neutron radiation. This test will
vices that are physically removed from the irradiation
produce degradation of the electrical properties of the
location. For the purpose of this guide, remote tests are used
irradiated devices and should be considered a destructive
only for the characterization of the parts before and after
test. Rapid annealing of displacement damage is usually
they are subjected to the neutron radiation (see 6.4).
associated with bipolar technologies.
1.2 This standard does not purport to address all of the
4. Summary of Guide
safety problems, if any, associated with its use. It is the
4.1 A rapid-annealing radiation test requires continual
responsibility of whoever uses this standard to consult and
time-sequential electricd-parameter measurements of key
establish appropriate safety and health practices and deter-
parameters of a device be made immediately following
mine the applicability of regulatory limitations prior to use.
exposure to a pulse of neutron radiation capable of causing
Specific hazard information is given in 4.2.7.
significant displacement damage.
2. Referenced Documents
4.2 Because many factors enter into the effects of the
radiation on the part, parties to the test must establish many
2. i ASTM Standards:
circumstances of the test before the validity of the test can be
E 666 Practice for Calculating Absorbed Dose from
established or the results of one group of parts can be
Gamma or X Radiation2
meaningfully compared with those of another group. Those
E 668 Practice for Application of Thermoluminescence-
factors that must be established are as follows:
Dosimetry (TLD) Systems for Determining Absorbed
4.2.1 Radiation Source-The type and characteristics of
Dose in Radiation-Hardness Testing of Electronic De-
the neutron radiation source to be used (see 6.2).
vices'
4.2.2 Dose Rate Range-The range of ionizing dose rates
E 720 Guide for Selection of a Set of Neutron-Activation
within which the neutron exposures must take place. These
Foils for Determining Neutron Spectra Used in Radia-
dose rates and the subsequent device response should not
tion-Hardness Testing of Electronics2
influence the parametric measurements being made (see 6.6).
E 721 IMethod for Determining Neutron Energy Spectra
4.2.3 Operating Conditions-The test circuit, electrical
with Neutron-Activation Foils for Radiation-Hardness
biases to be applied, and operating sequence (if applicable)
Testing of Electronics2
for the part during and following exposure (see 6.5).
E 722 Practice for Characterizing Neutron Energy Fiuence
4.2.4 Electrical Parameter Measurements-The pre- and
Spectra in Terms of An Equivalent Monoenergetic
post-irradiation measurements to be made on the test unit
Neutron Fiuence for Radiation-Hardness Testing of
and the measurements of changes in the annealing-sensitive
Electronics2
parameters to be made beginning immediately after expo-
F 1032 Guide for Measuring Time-Dependent Total-Dose
sure.
Effects in Semiconductor Devices Exposed to Pulsed
4.2.5 Time Sequence-The exposure time, time after
Ionizing Radiation)
exposure when measurements of the selected parameter(s)
are to begin, time when measurements are to end, and time
3. Terminology
intervals between measurements.
3.1 Descriptions of Terms Specific to This Standard:
4.2.6 Neutron Fluence Levels-The fluence range re-
3.1. I in situ rests-electrical measurements made on
quired to sustain the desired damage to the device.
devices before, after, or during irradiation while they remain
4.2.6.1 Total Dose Levels-If the part is sensitive to an
accompanying type of radiation (such as gamma rays) the
levels to which the part can be exposed before the rapid-
I Th
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