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ASTM F1711-96(2002)

(Practice)

Standard Practice for Measuring Sheet Resistance of Thin Film Conductors for Flat Panel Display Manufacturing Using a Four-Point Probe

Standard Practice for Measuring Sheet Resistance of Thin Film Conductors for Flat Panel Display Manufacturing Using a Four-Point Probe

SCOPE
1.1 This practice describes methods for measuring the sheet electrical resistance of sputtered thin conductive films deposited on large insulating substrates, used in making flat panel information displays. It is assumed that the thickness of the conductive thin film is much thinner than the spacing of the contact probes used to measure the sheet resistance.
1.2 This standard is intended to be used with Test Method F 390.
1.3 Sheet resistivity in the range 0.5 to 5000 ohms per square may be measured by this practice. The sheet resistance is assumed uniform in the area being probed.
1.4 This practice is applicable to flat surfaces only.
1.5 Probe pin spacings of 1.5 mm to 5.0 mm, inclusive (0.059 to 0.197 in inclusive) are covered by this practice.
1.6 The method in this practice is potentially destructive to the thin film in the immediate area in which the measurement is made. Areas tested should thus be characteristic of the functional part of the substrate, but should be remote from critical active regions. The method is suitable for characterizing dummy test substrates processed at the same time as substrates of interest.
1.7 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.
1.8 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

General Information

Status
Historical
Publication Date
09-Dec-2002
ICS
31.120 - Electronic display devices
Technical Committee
F01 - Electronics
Drafting Committee
F01.17 - Sputter Metallization
Current Stage
Ref Project

Relations

Replaces
ASTM F1711-96 - Standard Practice for Measuring Sheet Resistance of Thin Film Conductors for Flat Panel Display Manufacturing Using a Four-Point Probe
Effective Date
10-Dec-2002
Replaced By
ASTM F1711-96(2008) - Standard Practice for Measuring Sheet Resistance of Thin Film Conductors for Flat Panel Display Manufacturing Using a Four-Point Probe Method
Effective Date
15-Jun-2008

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ASTM F1711-96(2002) - Standard Practice for Measuring Sheet Resistance of Thin Film Conductors for Flat Panel Display Manufacturing Using a Four-Point ProbeASTM F1711-96(2002) - Standard Practice for Measuring Sheet Resistance of Thin Film Conductors for Flat Panel Display Manufacturing Using a Four-Point Probe
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ASTM F1711-96(2002) - Standard Practice for Measuring Sheet Resistance of Thin Film Conductors for Flat Panel Display Manufacturing Using a Four-Point Probe
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Standards Content (Sample)

NOTICE: This standard has either been superseded and replaced by a new version or withdrawn.
Contact ASTM International (www.astm.org) for the latest information
Designation: F 1711 – 96 (Reapproved 2002)
Standard Practice for
Measuring Sheet Resistance of Thin Film Conductors for
Flat Panel Display Manufacturing Using a Four-Point Probe
1
Method
This standard is issued under the fixed designation F 1711; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision.Anumber in parentheses indicates the year of last reapproval.A
superscript epsilon (e) indicates an editorial change since the last revision or reapproval.
2
1. Scope Films With a Collinear Four-Probe Array
1.1 This practice describes methods for measuring the sheet
3. Terminology
electrical resistance of sputtered thin conductive films depos-
3.1 Definitions:
ited on large insulating substrates, used in making flat panel
3.1.1 For definitions of terms used in this practice see Test
information displays. It is assumed that the thickness of the
Method F390.
conductive thin film is much thinner than the spacing of the
contact probes used to measure the sheet resistance.
4. Summary of Practice
1.2 This standard is intended to be used with Test Method
4.1 This practice describes the preferred means of applying
F390.
TestMethodF390tomeasuretheelectricalsheetresistanceof
1.3 Sheet resistivity in the range 0.5 to 5000 ohms per
thinfilmsonverylargeflatsubstrates.Anarrayoffourpointed
square may be measured by this practice. The sheet resistance
probesisplacedincontactwiththefilmofinterest.Ameasured
is assumed uniform in the area being probed.
electrical current is passed between two of the probes, and the
1.4 This practice is applicable to flat surfaces only.
electrical potential difference between the remaining two
1.5 Probe pin spacings of 1.5 mm to 5.0 mm, inclusive
probes is determined. The sheet resistance is calculated from
(0.059 to 0.197 in inclusive) are covered by this practice.
the measured current and potential values using correction
1.6 The method in this practice is potentially destructive to
factors associated with the probe geometry and the probe’s
the thin film in the immediate area in which the measurement
distance from the test specimen’s boundaries.
is made. Areas tested should thus be characteristic of the
4.2 The method of F390 is extended to cover staggered
functional part of the substrate, but should be remote from
in-lineandsquareprobearrays.Inallthedesigns,however,the
critical active regions. The method is suitable for characteriz-
probe spacings are nominally equal.
ing dummy test substrates processed at the same time as
4.3 This practice includes a special electrical test for veri-
substrates of interest.
fying the proper functioning of the potential measuring instru-
1.7 The values stated in SI units are to be regarded as the
ment (voltmeter), directions for making and using sheet resis-
standard. The values given in parentheses are for information
tance reference films, an estimation of measurement error
only.
caused by probe wobble in the probe supporting fixture, and a
1.8 This standard does not purport to address all of the
protocol for reporting film uniformity.
safety concerns, if any, associated with its use. It is the
4.4 Two appendices indicate the computation methods em-
responsibility of the user of this standard to establish appro-
ployed in deriving numerical relationships and correction
priate safety and health practices and determine the applica-
factors employed in this practice, and in Test Method F390.
bility of regulatory limitations prior to use.
5. Significance and Use
2. Referenced Documents
5.1 Applying Test Method F390 to large flat panel sub-
2.1 ASTM Standards:
strates presents a number of serious difficulties not anticipated
F390 Test Method for Sheet Resistance of Thin Metallic
in the development of that standard. The following problems
are encountered.
1
This practice is under the jurisdiction ofASTM Committee F01 on Electronics
and is the direct responsibility of Subcommittee F01.17 on Sputter Metallization.
Current edition approved Dec. 10, 2002. Published May 2003. Originally
2
approved in 1996. Last previous edition approved in 1996 as F1711–96.
Annual Book of ASTM Standards, Vol 10.04.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
1

---------------------- Page: 1 ----------------------
F 1711 – 96 (2002)
5.1.5.1 As a referee method, in which the probe and
measuring apparatus are checked and qualified before use by
the procedures of Test Method F390 paragraph 7 and this
practice, paragraph 8: standard deviation, s, from measured
sheet resistance, R,is# 0.01 R .
S S
5.1.5.2 As a routine method, with periodic qualifications of
probe and measuring apparatus by the procedures of Test
Method F390 paragraph 7 and this practice, paragraph 8:
standard deviation,
...

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