EN ISO 25178-603:2013

Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013)

ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft - Teil 603: Merkmale von berührungslos messenden Geräten (phasenschiebende interferometrische Mikroskopie) (ISO 25178-603:2013)

Dieser Teil der ISO 25178 legt die messtechnischen Eigenschaften von Messgeräten der phasenschiebenden interferometrischen (PSI ) Mikroskopie zur Messung von Oberflächenprofilen und zur flächenhaften Messung der Oberflächenbeschaffenheit fest.

Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 603: Caractéristiques nominales des instruments sans contact (microscopes interférométriques à glissement de franges) (ISO 25178-603:2013)

L'ISO 25178-603:2013 décrit les caractéristiques métrologiques des microscopes de mesure de profil et d'état de surface surfacique par interférométrie à glissement de franges (PSI).

Specifikacija geometrijskih veličin izdelka (GPS) - Tekstura površine: ravna - 603. del: Imenske značilnosti nekontaktnih instrumentov (interferometrijska mikroskopija s faznim zamikom) (ISO 25178-603:2013)

Та del standarda ISO 25178 opisuje meroslovne značilnosti interferometrijskih mikroskopov s faznim zamikom in mikroskopov za merjenje površinske teksture.

General Information

• Status: Published
• Publication Date: 01-Oct-2013
• Withdrawal Date: 29-Apr-2014
• ICS: 17.040.20 - Properties of surfaces
• ICS: 17.040.30 - Measuring instruments
• Technical Committee: CEN/TC 290 - Dimensional and geometrical product specification and verification
• Drafting Committee: CEN/TC 290 - Dimensional and geometrical product specification and verification
• Current Stage: 6060 - Definitive text made available (DAV) - Publishing
• Start Date: 02-Oct-2013
• Due Date: 14-Dec-2010
• Completion Date: 02-Oct-2013
• Ref Project: SIST EN ISO 25178-603:2014 - Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013)

Relations

• Revised: prEN ISO 25178-603 - Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments (ISO/DIS 25178‑603:2023)
• Effective Date: 19-Jan-2023

Standards Content (Sample)

SLOVENSKI STANDARD
SIST EN ISO 25178-603:2014
01-julij-2014
6SHFLILNDFLMDJHRPHWULMVNLKYHOLþLQL]GHOND*367HNVWXUDSRYUãLQHUDYQD
GHO,PHQVNH]QDþLOQRVWLQHNRQWDNWQLKLQVWUXPHQWRYLQWHUIHURPHWULMVND
PLNURVNRSLMDVID]QLP]DPLNRP,62
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal
characteristics of non-contact (phase-shifting interferometric microscopy) instruments
(ISO 25178-603:2013)
Geometrische Produktspezifikation (GPS) - Oberflächenbeschaffenheit: Flächenhaft -
Teil 603: Merkmale von berührungslos messenden Geräten (der phasenverschiebenden
interferometrischen Mikroskopie) (ISO 25178-603:2013)
Spécification géométrique des produits (GPS) - État de surface: Surfacique - Partie 603:
Caractéristiques nominales des instruments sans contact (microscopes
interférométriques à glissement de franges) (ISO 25178-603:2013)
Ta slovenski standard je istoveten z: EN ISO 25178-603:2013
ICS:
17.040.20 Lastnosti površin Properties of surfaces
SIST EN ISO 25178-603:2014 en
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

---------------------- Page: 1 ----------------------

SIST EN ISO 25178-603:2014

---------------------- Page: 2 ----------------------

SIST EN ISO 25178-603:2014


EUROPEAN STANDARD
EN ISO 25178-603

NORME EUROPÉENNE

EUROPÄISCHE NORM
October 2013
ICS 17.040.20
English Version
Geometrical product specifications (GPS) - Surface texture:
Areal - Part 603: Nominal characteristics of non-contact (phase-
shifting interferometric microscopy) instruments (ISO 25178-
603:2013)
Spécification géométrique des produits (GPS) - État de Geometrische Produktspezifikation (GPS) -
surface: Surfacique - Partie 603: Caractéristiques Oberflächenbeschaffenheit: Flächenhaft - Teil 603:
nominales des instruments sans contact (microscopes Merkmale von berührungslos messenden Geräten
interférométriques à glissement de franges) (ISO 25178- (phasenschiebende interferometrische Mikroskopie) (ISO
603:2013) 25178-603:2013)
This European Standard was approved by CEN on 19 August 2013.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European
Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national
standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN member.

This European Standard exists in three official versions (English, French, German). A version in any other language made by translation
under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same
status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania,
Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland, Turkey and United
Kingdom.





EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION

EUROPÄISCHES KOMITEE FÜR NORMUNG

CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels
© 2013 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 25178-603:2013: E
worldwide for CEN national Members.

---------------------- Page: 3 ----------------------

SIST EN ISO 25178-603:2014
EN ISO 25178-603:2013 (E)
Contents Page
Foreword .3

2

---------------------- Page: 4 ----------------------

SIST EN ISO 25178-603:2014
EN ISO 25178-603:2013 (E)
Foreword
This document (EN ISO 25178-603:2013) has been prepared by Technical Committee ISO/TC 213
"Dimensional and geometrical product specifications and verification" in collaboration with Technical
Committee CEN/TC 290 “Dimensional and geometrical product specification and verification” the secretariat of
which is held by AFNOR.
This European Standard shall be given the status of a national standard, either by publication of an identical
text or by endorsement, at the latest by April 2014, and conflicting national standards shall be withdrawn at the
latest by April 2014.
Attention is drawn to the possibility that some of the elements of this document may be the subject of patent
rights. CEN [and/or CENELEC] shall not be held responsible for identifying any or all such patent rights.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the following
countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,
...