prEN ISO 14644-13

Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical concentration (ISO/FDIS 14644-13:2025)

ISO 14644-13:2017 gives guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. Under consideration are all surfaces (external or internal) that are of interest. It provides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP) and surface cleanliness by chemical concentration (SCC) classes and which techniques should be considered to achieve these specified levels.
The appropriateness of cleaning techniques will make reference to the cleanliness classes and associated test methods found in ISO 14644‑9 and ISO 14644‑10.
The following matters of general guidance will be provided:
-      expected surface cleanliness levels;
-      suitability of cleaning methods;
-      compatibility of surfaces with the cleaning technique;
-      assessment of cleaning appropriateness.
The following will be excluded from this document:
-      classification of cleaning methods;
-      product produced within a cleanroom;
-      specific surface-related cleaning methods;
-      detailed description of cleaning mechanisms, methods and procedures of various cleaning methods;
-      detailed material characteristics;
-      description of damage mechanisms by cleaning processes and time-dependent effects;
-      references to interactive bonding forces between contaminants and surfaces or generation processes that are usually time-dependent and process-dependent;
-      other characteristics of particles such as electrostatic charge, ionic charges, etc.;
-      chemical reactions between molecular contaminants and surfaces;
-      microbiological aspects of surface cleanliness;
-      radioactive aspects of contamination;
-      health and safety considerations;
-      environmental aspects such as waste disposal, emissions, etc.;
-      selection and use of statistical methods.

Reinräume und zugehörige Reinraumbereiche - Teil 13: Reinigung von Oberflächen zur Erreichung definierter Reinheitsgrade hinsichtlich Partikel- und Chemikalienkonzentration (ISO/FDIS 14644‑13:2025)

Dieses Dokument gibt Richtlinien zur Reinigung von Reinraumoberflächen, Oberflächen der Ausrüstung in einem Reinraum und Oberflächen von Materialien in einem Reinraum bis zu einem festgelegten Grad. Berücksichtigt werden alle relevanten Oberflächen (extern oder intern). Es gibt Anleitungen zur Bewertung von Reinigungsverfahren zum Erreichen der geforderten Stufen der partikulären Oberflächenreinheit (en: surface cleanliness by particle concentration, SCP) und der chemischen Oberflächenreinheit (en: surface cleanliness by chemical concentration, SCC) und in Bezug darauf, welche Techniken zum Erreichen dieser festgelegten Grade berücksichtigt werden sollten.
Bei der Eignung von Reinigungstechniken wird auf die Reinheitsstufen und die damit verbundenen Prüfverfahren aus ISO 14644 9 und ISO 14644 10 verwiesen.
Dieses Dokument gibt allgemeine Anleitungen zu Folgendem:
   die erwarteten Oberflächenreinheitsgrade;
   die Eignung der Reinigungsverfahren;
   die Kompatibilität von Oberflächen mit der Reinigungstechnik;
   die Bewertung der Eignung für die Reinigung.
Das Folgende wird in diesem Dokument nicht berücksichtigt:
   die Klassifizierung von Reinigungsverfahren;
   das innerhalb eines Reinraums hergestellte Produkt;
   die spezifische Oberfläche in Bezug auf die Reinigungsverfahren;
   die detaillierte Beschreibung von Reinigungsmechanismen, -verfahren sowie Verfahrensweisen von verschiedenen Reinigungsverfahren;
   die detaillierten Materialkenngrößen;
   die Beschreibung von Mechanismen hinsichtlich Schäden durch die Reinigungsprozesse und zeitabhängigen Auswirkungen;
   Verweisungen auf interaktive Bindungskräfte zwischen den Kontaminanten und Oberflächen oder Generierungsprozesse, die üblicherweise zeit- und prozessabhängig sind;
   weitere Kenngrößen von Partikeln, beispielsweise elektrostatische Ladung, Ionenladungen usw.;
   die chemischen Reaktionen zwischen molekularen Kontaminanten und Oberflächen;
   die mikrobiologischen Aspekte der Oberflächenreinheit;
   die radioaktiven Aspekte der Kontamination;
   die Aspekte des Gesundheitsschutzes und der Arbeitssicherheit;
   die Umweltaspekte, beispielsweise Abfallentsorgung, Emissionen usw.;
   die Auswahl und Anwendung von statistischen Verfahren.

Salles propres et environnements maîtrisés apparentés - Partie 13: Nettoyage des surfaces afin d'obtenir des niveaux de propreté par rapport aux classifications particulaire et chimique (ISO/FDIS 14644-13:2025)

ISO 14644-13:2017 donne des lignes directrices concernant le nettoyage, jusqu'à atteindre un degré de nettoyage spécifié, des surfaces d'une salle propre ainsi que des surfaces des équipements et des matériaux contenus dans une salle propre. Toutes les surfaces d'intérêt (internes ou externes) sont concernées par le présent document. Il fournit des préconisations concernant l'évaluation des méthodes de nettoyage en vue d'obtenir les classes exigées de propreté particulaire des surfaces (SCP) et de propreté chimique des surfaces (SCC) ainsi que les techniques qu'il convient d'utiliser pour atteindre ces niveaux spécifiés.
L'adéquation des techniques de nettoyage fera référence aux classes de propreté et aux méthodes d'essai associées disponibles dans l'ISO 14644‑9 et l'ISO 14644‑10.
Les préconisations générales porteront sur les questions suivantes:
-      niveaux de propreté des surfaces souhaités;
-      pertinence des méthodes de nettoyage;
-      compatibilité des surfaces avec la technique de nettoyage;
-      évaluation de l'adéquation du nettoyage.
Les points suivants ne seront pas traités dans le présent document:
-      classification des méthodes de nettoyage;
-      produits fabriqués dans une salle propre;
-      méthodes de nettoyage spécifiques en lien avec une surface;
-      description détaillée des mécanismes de nettoyage, méthodes et modes opératoires de diverses méthodes de nettoyage;
-      caractéristiques détaillées des matériaux;
-      description des mécanismes de détérioration dus aux procédés de nettoyage et effets dans le temps;
-      références aux forces de liaison entre les contaminants et les surfaces, ou aux processus de génération qui dépendent généralement du temps et du procédé;
-      autres caractéristiques des particules, telles que la charge électrostatique, les charges ioniques, etc.;
-      réactions chimiques entre les contaminants moléculaires et les surfaces;
-      aspects microbiologiques de la propreté des surfaces;
-      aspects radioactifs de la contamination;
-      considérations relatives à la santé et la sécurité;
-      aspects environnementaux tels que l'élimination des déchets, les émissions, etc.;
-      sélection et utilisation de méthodes statistiques.

Čiste sobe in podobna nadzorovana okolja - 13. del: Čiščenje površin za doseganje določenih ravni čistoče po klasifikaciji delcev in kemikalij (ISO/FDIS 14644-13:2025)

General Information

• Status: Not Published
• Publication Date: 16-May-2027
• ICS: 13.040.35 - Cleanrooms and associated controlled environments
• Technical Committee: CEN/TC 243 - Cleanroom technology
• Drafting Committee: CEN/TC 243 - Cleanroom technology
• Current Stage: 4020 - Submission to enquiry - Enquiry
• Start Date: 23-Oct-2025
• Completion Date: 23-Oct-2025
• Ref Project: oSIST prEN ISO 14644-13:2025 - Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical concentration (ISO/FDIS 14644-13:2025)

Relations

• Revises: EN ISO 14644-13:2017 - Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications (ISO 14644-13:2017)
• Effective Date: 17-Mar-2025

Standards Content (Sample)

SLOVENSKI STANDARD
01-december-2025
Čiste sobe in podobna nadzorovana okolja - 13. del: Čiščenje površin za
doseganje določenih ravni čistoče po klasifikaciji delcev in kemikalij (ISO/FDIS
14644-13:2025)
Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to
achieve defined levels of cleanliness in terms of particle and chemical concentration
(ISO/FDIS 14644-13:2025)
Reinräume und zugehörige Reinraumbereiche - Teil 13: Reinigung von Oberflächen zur
Erreichung definierter Reinheitsgrade hinsichtlich Partikel- und
Chemikalienklassifikationen (ISO/FDIS 14644-13:2025)
Salles propres et environnements maîtrisés apparentés - Partie 13: Nettoyage des
surfaces afin d'obtenir des niveaux de propreté par rapport aux classifications
particulaire et chimique (ISO/FDIS 14644-13:2025)
Ta slovenski standard je istoveten z: prEN ISO 14644-13
ICS:
13.040.35 Brezprašni prostori in Cleanrooms and associated
povezana nadzorovana controlled environments
okolja
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

FINAL DRAFT
International
Standard
ISO/FDIS 14644-13
ISO/TC 209
Cleanrooms and associated
Secretariat: ANSI
controlled environments —
Voting begins on:
Part 13:
Cleaning of surfaces to achieve
Voting terminates on:
defined levels of cleanliness in
terms of particle and chemical
concentration
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WITH THEIR COMMENTS, NOTIFICATION OF ANY
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MADE IN NATIONAL REGULATIONS.
Reference number
ISO/FDIS 14644-13:2025(en) © ISO 2025

FINAL DRAFT
ISO/FDIS 14644-13:2025(en)
International
Standard
ISO/FDIS 14644-13
ISO/TC 209
Cleanrooms and associated
Secretariat: ANSI
controlled environments —
Voting begins on:
Part 13:
Cleaning of surfaces to achieve
Voting terminates on:
defined levels of cleanliness in
terms of particle and chemical
concentration
RECIPIENTS OF THIS DRAFT ARE INVITED TO SUBMIT,
WITH THEIR COMMENTS, NOTIFICATION OF ANY
RELEVANT PATENT RIGHTS OF WHICH THEY ARE AWARE
AND TO PROVIDE SUPPOR TING DOCUMENTATION.
© ISO 2025
IN ADDITION TO THEIR EVALUATION AS
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
BEING ACCEPTABLE FOR INDUSTRIAL, TECHNO-
ISO/CEN PARALLEL PROCESSING
LOGICAL, COMMERCIAL AND USER PURPOSES, DRAFT
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on
INTERNATIONAL STANDARDS MAY ON OCCASION HAVE
the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below
TO BE CONSIDERED IN THE LIGHT OF THEIR POTENTIAL
or ISO’s member body in the country of the requester.
TO BECOME STAN DARDS TO WHICH REFERENCE MAY BE
MADE IN NATIONAL REGULATIONS.
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Published in Switzerland Reference number
ISO/FDIS 14644-13:2025(en) © ISO 2025

ii
ISO/FDIS 14644-13:2025(en)
Contents Page
Foreword .v
Introduction .vi
1 Scope . 1
2 Normative references . 2
3 Terms and definitions . 2
4 General methodology . 3
4.1 Overview .3
4.2 Methodology .4
5 Object description . 5
6 Cleanliness specifications . 6
7 Determination of initial contamination level . 6
7.1 General .6
7.2 Determination of initial contamination level with respect to particle concentration .6
7.3 Determination of initial contamination level with respect to chemical concentration .6
8 Other requirements . . 7
9 Selection of a cleaning methodology . 7
9.1 Selection procedure .7
9.2 Cleaning methodologies .7
9.2.1 Cleaning method .7
9.2.2 Categories of cleaning techniques .7
9.3 Cleaning process .8
10 Material compatibility check . 8
11 Cleaning validation . 8
11.1 General .8
11.2 Cleaning efficiency .9
11.2.1 Evaluation .9
11.2.2 Cleaning efficiency with respect to particle concentration .10
11.2.3 Cleaning efficiency with respect to chemical contamination .11
11.3 Cleaning appropriateness .11
11.3.1 Assessment .11
11.3.2 Cleaning appropriateness with respect to particle concentration . 12
11.3.3 Cleaning appropriateness with respect to chemical concentration . 13
12 Measurement methods . 14
12.1 General .14
12.2 Direct measurement methods .14
12.2.1 General .14
12.2.2 Direct measurement methods with respect to SCP .14
12.2.3 Direct measurement methods with respect to SCC .14
12.3 Indirect measurement methods .14
12.3.1 General .14
12.3.2 Indirect measurement methods with respect to SCP . . 15
12.3.3 Indirect measurement methods with respect to SCC . 15
13 Documentation .15
Annex A (informative) Aspects of cleaning . 17
Annex B (informative) Cleaning methods .18
Annex C (informative) Material compatibility with cleaning agents .25
Annex D (informative) Cleanliness measurement .27

iii
ISO/FDIS 14644-13:2025(en)
Bibliography .32

iv
ISO/FDIS 14644-13:2025(en)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out through
ISO technical committees. Each member body interested in a subject for which a technical committee
has been established has the right to be represented on that committee. International organizations,
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with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are described
in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the different types
of ISO document should be noted. This document was drafted in accordance with the editorial rules of the
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ISO draws attention to the possibility that the implementation of this document may involve the use of (a)
patent(s). ISO takes no position concerning the evidence, validity or applicability of any claimed patent
rights in respect thereof. As of the date of pu
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