EN 62374:2007
(Main)Semiconductor devices - Time Dependent Dielectric Breakdown (TDDB) test for gate dielectric films
Semiconductor devices - Time Dependent Dielectric Breakdown (TDDB) test for gate dielectric films
Provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure
Halbleiterbauelemente - Prüfung des zeitabhängigen dielektrischen Durchbruchs (TDDB) für dielektrische Gate-Schichten
Dispositifs à semiconductors - Essai de rupture diélectrique en fonction du temps (TDDB) pour films diélectriques de grille
Cette norme décrit une méthode d essai de la rupture diélectrique en fonction du temps (TDDB) pour films diélectriques de grille des dispositifs à semiconducteurs et une méthode d estimation de la durée de vie de produit en présence d unedéfaillance de type TDDB.
Polprevodniški elementi - Preskus dielektrične plasti vrat s časovno odvisnim dielektričnim prebojem (TDDB) (IEC 62374:2007)
General Information
Standards Content (Sample)
SLOVENSKI STANDARD
SIST EN 62374:2008
01-januar-2008
3ROSUHYRGQLãNLHOHPHQWL3UHVNXVGLHOHNWULþQHSODVWLYUDWVþDVRYQRRGYLVQLP
GLHOHNWULþQLPSUHERMHP 7''% ,(&
Semiconductor devices - Time Dependent Dielectric Breakdown (TDDB) test for gate
dielectric films
Halbleiterbauelemente - Prüfung des zeitabhängigen dielektrischen Durchbruchs (TDDB)
für dielektrische Gate-Schichten
Dispositifs à semiconductors - Essai de rupture diélectrique en fonction du temps
(TDDB) pour films diélectriques de grille
Ta slovenski standard je istoveten z: EN 62374:2007
ICS:
31.080.01 Polprevodniški elementi Semiconductor devices in
(naprave) na splošno general
SIST EN 62374:2008 en,fr,de
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.
---------------------- Page: 1 ----------------------
SIST EN 62374:2008
---------------------- Page: 2 ----------------------
SIST EN 62374:2008
EUROPEAN STANDARD
EN 62374
NORME EUROPÉENNE
October 2007
EUROPÄISCHE NORM
ICS 31.080
English version
Semiconductor devices -
Time Dependent Dielectric Breakdown (TDDB) test
for gate dielectric films
(IEC 62374:2007)
Dispositifs à semiconductors - Halbleiterbauelemente -
Essai de rupture diélectrique Prüfung des zeitabhängigen
en fonction du temps (TDDB) dielektrischen Durchbruchs (TDDB)
pour films diélectriques de grille für dielektrische Gate-Schichten
(CEI 62374:2007) (IEC 62374:2007)
This European Standard was approved by CENELEC on 2007-10-01. CENELEC members are bound to comply
with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard
the status of a national standard without any alteration.
Up-to-date lists and bibliographical references concerning such national standards may be obtained on
application to the Central Secretariat or to any CENELEC member.
This European Standard exists in three official versions (English, French, German). A version in any other
language made by translation under the responsibility of a CENELEC member into its own language and notified
to the Central Secretariat has the same status as the official versions.
CENELEC members are the national electrotechnical committees of Austria, Belgium, Bulgaria, Cyprus, the
Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia,
Lithuania, Luxembourg, Malta, the Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain,
Sweden, Switzerland and the United Kingdom.
CENELEC
European Committee for Electrotechnical Standardization
Comité Européen de Normalisation Electrotechnique
Europäisches Komitee für Elektrotechnische Normung
Central Secretariat: rue de Stassart 35, B - 1050 Brussels
© 2007 CENELEC - All rights of exploitation in any form and by any means reserved worldwide for CENELEC members.
Ref. No. EN 62374:2007 E
---------------------- Page: 3 ----------------------
SIST EN 62374:2008
EN 62374:2007 – 2 –
Foreword
The text of document 47/1894/FDIS, future edition 1 of IEC 62374, prepared by IEC TC 47,
Semiconductor devices, was submitted to the IEC-CENELEC parallel vote and was approved by
CENELEC as EN 62374 on 2007-10-01.
The following dates were fixed:
– latest date by which the EN has to be implemented
at national level by publication of an identical
national standard or by endorsement (dop) 2008-07-01
– latest date by which the national standards conflicting
with the EN have to be withdrawn (dow) 2010-10-01
__________
Endorsement notice
The text of the International Standard IEC 62374:2007 was approved by CENELEC as a European
Standard without any modification.
__________
---------------------- Page: 4 ----------------------
SIST EN 62374:2008
NORME CEI
INTERNATIONALE
IEC
62374
INTERNATIONAL
Première édition
STANDARD
First edition
2007-03
Dispositifs à semiconducteurs –
Essai de rupture diélectrique en fonction du
temps (TDDB) pour films diélectriques de grille
Semiconductor devices –
Time dependent dielectric breakdown
(TDDB) test for gate dielectric films
© IEC 2007 Droits de reproduction réservés ⎯ Copyright - all rights reserved
Aucune partie de cette publication ne peut être reproduite ni No part of this publication may be reproduced or utilized in any
utilisée sous quelque forme que ce soit et par aucun procédé, form or by any means, electronic or mechanical, including
électronique ou mécanique, y compris la photocopie et les photocopying and microfilm, without permission in writing from
microfilms, sans l'accord écrit de l'éditeur. the publisher.
International Electrotechnical Commission, 3, rue de Varembé, PO Box 131, CH-1211 Geneva 20, Switzerland
Telephone: +41 22 919 02 11 Telefax: +41 22 919 03 00 E-mail: inmail@iec.ch Web: www.iec.ch
CODE PRIX
S
PRICE CODE
Commission Electrotechnique I
...
Questions, Comments and Discussion
Ask us and Technical Secretary will try to provide an answer. You can facilitate discussion about the standard in here.