EN ISO 19749:2023

Nanotechnologies - Measurements of particle size and shape distributions by scanning electron microscopy (ISO 19749:2021)

This document specifies methods of determining nanoparticle size and shape distributions by acquiring and evaluating scanning electron microscope images and by obtaining and reporting accurate results.
This document applies to particles with a lower size limit that depends on the required uncertainty and on the suitable performance of the SEM, which is to be proven first -according to the requirements described in this document.
This document applies also to SEM-based size and shape measurements of larger than nanoscale particles.

Nanotechnologien - Messung der Partikelgrößenverteilung und Partikelformverteilung mit Rasterelektronenmikroskopie (ISO 19749:2021)

Dieses Dokument legt Verfahren zur Bestimmung von Größen- und Formverteilungen von Nanopartikeln durch Erfassung und Auswertung von Bildern des Rasterelektronenmikroskops sowie durch die Ermittlung und Berichterstattung genauer Ergebnisse fest.
ANMERKUNG 1   Dieses Dokument ist anwendbar für Partikel mit einer unteren Größengrenze, die von der erforderlichen Unsicherheit und von der geeigneten Leistung des REM abhängt, die zunächst entsprechend den in diesem Dokument beschriebenen Anforderungen nachgewiesen werden muss.
ANMERKUNG 2   Dieses Dokument ist auch anwendbar für REM-basierte Größen- und Formmessungen von Partikeln, die größer als im Nanomaßstab sind.

Nanotechnologies - Détermination de la distribution de taille et de forme des particules par microscopie électronique à balayage (ISO 19749:2021)

Nanotehnologije - Meritve porazdelitve velikosti in oblike delcev s skenirno elektronsko mikroskopijo (ISO 19749:2021)

Ta dokument določa metode za določanje velikosti in oblike razporeditve nanodelcev z uporabo in ocenjevanjem slik vrstičnega elektronskega mikroskopa in pridobivanjem in poročanje točnih rezultatov.
Ta dokument se uporablja za delce z manjšo omejitvijo velikosti, ki je odvisna od zahtevane negotovosti in ustrezne zmogljivosti vrstičnega elektronskega mikroskopa, ki jo je treba najprej dokazati v skladu z zahtevami, opisanimi v tem dokumentu.
Ta dokument se uporablja tudi za merjenje velikosti in oblike delcev, ki so večji od nanodelcev, z vrstičnim elektronskim mikroskopom.

General Information

• Status: Published
• Publication Date: 28-Mar-2023
• ICS: 07.120 - Nanotechnologies
• Technical Committee: CEN/TC 352 - Nanotechnologies
• Drafting Committee: CEN/TC 352 - Nanotechnologies
• Current Stage: 6060 - Definitive text made available (DAV) - Publishing
• Start Date: 29-Mar-2023
• Due Date: 15-Dec-2024
• Completion Date: 29-Mar-2023
• Ref Project: SIST EN ISO 19749:2023 - Nanotechnologies - Measurements of particle size and shape distributions by scanning electron microscopy (ISO 19749:2021)

Standards Content (Sample)

SLOVENSKI STANDARD
01-maj-2023
Nanotehnologije - Meritve porazdelitve velikosti in oblike delcev s skenirno
elektronsko mikroskopijo (ISO 19749:2021)
Nanotechnologies - Measurements of particle size and shape distributions by scanning
electron microscopy (ISO 19749:2021)
Nanotechnologien - Messung der Partikelgrößenverteilung und Partikelformverteilung mit
Rasterelektronenmikroskopie (ISO 19749:2021)
Nanotechnologies - Détermination de la distribution de taille et de forme des particules
par microscopie électronique à balayage (ISO 19749:2021)
Ta slovenski standard je istoveten z: EN ISO 19749:2023
ICS:
07.120 Nanotehnologije Nanotechnologies
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

EN ISO 19749
EUROPEAN STANDARD
NORME EUROPÉENNE
March 2023
EUROPÄISCHE NORM
ICS 07.120
English Version
Nanotechnologies - Measurements of particle size and
shape distributions by scanning electron microscopy (ISO
19749:2021)
Nanotechnologies - Détermination de la distribution de Nanotechnologien - Messung der
taille et de forme des particules par microscopie Partikelgrößenverteilung und Partikelformverteilung
électronique à balayage (ISO 19749:2021) mit Rasterelektronenmikroskopie (ISO 19749:2021)
This European Standard was approved by CEN on 10 March 2023.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this
European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references
concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN
member.
This European Standard exists in three official versions (English, French, German). A version in any other language made by
translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management
Centre has the same status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway,
Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Türkiye and
United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION

EUROPÄISCHES KOMITEE FÜR NORMUNG

CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels
© 2023 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 19749:2023 E
worldwide for CEN national Members.

Contents Page
European foreword . 3

European foreword
The text of ISO 19749:2021 has been prepared by Technical Committee ISO/TC 229 "Nanotechnologies”
of the International Organization for Standardization (ISO) and has been taken over as
is held by AFNOR.
This European Standard shall be given the status of a national standard, either by publication of an
identical text or by endorsement, at the latest by September 2023, and conflicting national standards
shall be withdrawn at the latest by September 2023.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN shall not be held responsible for identifying any or all such patent rights.
Any feedback and questions on this document should be directed to the users’ national standards body.
A complete listing of these bodies can be found on the CEN website.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,
Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland,
Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Republic of
North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Türkiye and the
United Kingdom.
Endorsement notice
The text of ISO 19749:2021 has been approved by CEN as EN ISO 19749:2023 without any modification.

INTERNATIONAL ISO
STANDARD 19749
First edition
2021-07
Nanotechnologies — Measurements of
particle size and shape distributions
by scanning electron microscopy
Nanotechnologies — Détermination de la distribution de taille et de
forme des particules par microscopie électronique à balayage
Reference number
ISO 19749:2021(E)
©
ISO 2021
ISO 19749:2021(E)
© ISO 2021
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting
on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address
below or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: [phone]
Email: [e-mail]
Website: www.iso.org
Published in Switzerland
ii © ISO 2021 – All rights reserved

ISO 19749:2021(E)
Contents Page
Foreword .v
Introduction .vi
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 2
3.1 General terms . 2
3.2 Core terms: image analysis . 4
3.3 Core terms: statistical symbols and definitions . 4
3.4 Core terms: measurands and descriptors . 6
3.5 Core terms: metrology . 8
3.6 Core terms: scanning electron microscopy .10
4 General principles .11
4.1 SEM imaging .11
4.2 SEM image-based particle size measurements .12
4.3 SEM image-based particle shape measurements .13
5 Sample preparation .13
5.1 Sample preparation fundamental information .13
5.2 General recommendations.14
5.3 Ensuring good sampling of powder or dispersion-in-liquid raw materials .14
5.3.1 Powders .14
5.3.2 Nanoparticle dispersions in liquids .15
5.4 Ensuring representative dispersion .15
5.5 Nanoparticle deposition on a substrate .15
5.5.1 General.15
5.5.2 Nanoparticle deposition on wafers and chips of silicon or other materials .16
5.5.3 Nanoparticle deposition on TEM grids .17
5.6 Number of samples to be prepared .18
5.7 Number of particles to be measured for particle size determination .18
5.8 Number of particles to be measured for particle shape determination .19
6 Qualification of the SEM for nanoparticle measurements .19
7 Image acquisition .19
7.1 General .19
7.2 Setting suitable image magnification and pixel resolution .23
8 Particle analysis .24
8.1 Particle analysis fundamental information .24
8.2 Individual particle analysis .25
8.3 Automated particle analysis .25
8.4 Automated particle analysis procedure example .26
9 Data analysis .27
9.1 General .27
9.2 Raw data screening: detecting touching particles, artefacts and contaminants .27
9.3 Fitting models to data .27
9.4 Assessment of measurement uncertainty .27
9.4.1 General.27
9.4.2 Example: Measurement uncertainty for particle size measurements .28
9.4.3 Bivariate analysis .29
10 Reporting the results .29
Annex A (normative) Qualification of the SEM for nanoparticle measurements .31
Annex B (informative) Cross-sectional titanium dioxide samples preparation .36
...