Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry (ISO 23216:2021)

This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.
It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.
It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.

Kohlenstoffschichten - Bestimmung der optischen Eigenschaften von amorphen Kohlenstoffschichten mittels spektroskopischer Ellipsometrie (ISO 23216:2021)

Dieses Dokument legt die spektroskopische Ellipsometrie für die Bestimmung der optischen Eigenschaften (Brechungsindex n und Extinktionskoeffizient k) und die optische Klassifizierung verschiedener Typen von amorphen Kohlenstoffschichten innerhalb der n k Ebene fest.
Es ist auf amorphe Kohlenstoffschichten anwendbar, die durch ionisiertes Verdampfen, Sputtern, Lichtbogenabscheidung, plasmaunterstützte chemische Gasphasenabscheidung, Heißdrahtverfahren und andere Verfahren abgeschieden wurden.
Es ist nicht anwendbar für Kohlenstoffschichten, die mit Metallen oder Silizium verändert worden sind, für amorphe Kohlenstoffschichten, die einen Gradienten ihrer Zusammensetzung/Eigenschaft in der Schichtdicke aufweisen, und für Farben und Lacke.

Films à base de carbone - Détermination des propriétés optiques des films de carbone amorphe par ellipsométrie spectroscopique (ISO 23216:2021)

Le présent document spécifie l'ellipsométrie spectroscopique pour la détermination des propriétés optiques (indice de réfraction n et coefficient d'extinction k) et la classification optique de différent types de films de carbone amorphe dans le plan n-k.
Il s'applique aux films de carbone amorphe déposés par évaporation ionisée, pulvérisation, dépôt par arc cathodique, dépôt chimique en phase vapeur assisté plasma (PAVCD), par filament chaud, et d'autres techniques.
Il ne s'applique pas aux films à base de carbone modifié avec des métaux ou du silicium, aux films de carbone amorphe qui ont un gradient de composition/propriété dans l'épaisseur, aux peintures et aux vernis.

Ogljikove plasti - Določanje optičnih lastnosti amorfnih ogljikovih plasti s spektroskopsko elipsometrijo (ISO 23216:2021)

Ta dokument določa optične lastnosti amorfnih ogljikovih plasti s spektroskopsko elipsometrijo (lomni količnik n in ekstinkcijski koeficient k) in optično razvrščanje različnih vrst amorfnih ogljikovih plasti znotraj ravnine n-k.
Uporablja se za amorfne ogljikove plasti, nanesene z ioniziranim izparevanjem, naprševanjem, obločnim nanašanjem, kemičnim naparjevanjem s pomočjo plazme, tehnikami vročih filamentov in drugimi.
Ne uporablja se za ogljikove plasti, modificirane s kovinami ali silicijem, amorfne ogljikove plasti, ki imajo gradient sestave/lastnosti v debelini, barvah in lakih.

General Information

Status
Published
Publication Date
08-Nov-2022
Current Stage
6060 - Definitive text made available (DAV) - Publishing
Start Date
09-Nov-2022
Due Date
07-Jul-2024
Completion Date
09-Nov-2022

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SLOVENSKI STANDARD
SIST EN ISO 23216:2023
01-januar-2023
Ogljikove plasti - Določanje optičnih lastnosti amorfnih ogljikovih plasti s
spektroskopsko elipsometrijo (ISO 23216:2021)
Carbon based films - Determination of optical properties of amorphous carbon films by
spectroscopic ellipsometry (ISO 23216:2021)
Kohlenstoffschichten - Bestimmung der optischen Eigenschaften von amorphen
Kohlenstoffschichten mittels spektroskopischer Ellipsometrie (ISO 23216:2021)
Films à base de carbone - Détermination des propriétés optiques des films de carbone
amorphe par ellipsométrie spectroscopique (ISO 23216:2021)
Ta slovenski standard je istoveten z: EN ISO 23216:2022
ICS:
25.220.99 Druge obdelave in prevleke Other treatments and
coatings
SIST EN ISO 23216:2023 en,fr,de
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

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SIST EN ISO 23216:2023

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SIST EN ISO 23216:2023


EN ISO 23216
EUROPEAN STANDARD

NORME EUROPÉENNE

November 2022
EUROPÄISCHE NORM
ICS 25.220.99
English Version

Carbon based films - Determination of optical properties of
amorphous carbon films by spectroscopic ellipsometry
(ISO 23216:2021)
Films à base de carbone - Détermination des propriétés Kohlenstoffschichten - Bestimmung der optischen
optiques des films de carbone amorphe par Eigenschaften von amorphen Kohlenstoffschichten
ellipsométrie spectroscopique (ISO 23216:2021) mittels spektrokopischer Ellipsometrie (ISO
23216:2021)
This European Standard was approved by CEN on 30 October 2022.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this
European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references
concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN
member.

This European Standard exists in three official versions (English, French, German). A version in any other language made by
translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management
Centre has the same status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,
Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway,
Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Türkiye and
United Kingdom.





EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION

EUROPÄISCHES KOMITEE FÜR NORMUNG

CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels
© 2022 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 23216:2022 E
worldwide for CEN national Members.

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SIST EN ISO 23216:2023
EN ISO 23216:2022 (E)
Contents Page
European foreword . 3

2

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SIST EN ISO 23216:2023
EN ISO 23216:2022 (E)
European foreword
The text of ISO 23216:2021 has been prepared by Technical Committee ISO/TC 107 "Metallic and other
inorganic coatings” of the International Organization for Standardization (ISO) and has been taken over
as EN ISO 23216:2022 by Technical Committee CEN/TC 262 “Metallic and other inorganic coatings,
including for corrosion protection and corrosion testing of metals and alloys” the secretariat of which is
held by BSI.
This European Standard shall be given the status of a national standard, either by publication of an
identical text or by endorsement, at the latest by May 2023, and conflicting national standards shall be
withdrawn at the latest by May 2023.
Attention is drawn to the possibility that some of the elements of this document may be the subject of
patent rights. CEN shall not be held responsible for identifying any or all such patent rights.
Any feedback and questions on this document should be directed to the users’ national standards body.
A complete listing of these bodies can be found on the CEN website.
According to the CEN-CENELEC Internal Regulations, the national standards organizations of the
following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,
Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland,
Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Republic of
North Macedonia, Romania, Serbia, Slovakia, Slo
...

SLOVENSKI STANDARD
oSIST prEN ISO 23216:2022
01-september-2022
Ogljikove plasti - Določanje optičnih lastnosti amorfnih ogljikovih plasti s
spektroskopsko elipsometrijo (ISO 23216:2021)
Carbon based films - Determination of optical properties of amorphous carbon films by
spectroscopic ellipsometry (ISO 23216:2021)
Kohlenstoffschichten - Bestimmung der optischen Eigenschaften von amorphen
Kohlenstoffschichten mittels spektrokopischer Ellipsometrie (ISO 23216:2021)
Films à base de carbone - Détermination des propriétés optiques des films de carbone
amorphe par ellipsométrie spectroscopique (ISO 23216:2021)
Ta slovenski standard je istoveten z: prEN ISO 23216
ICS:
25.220.99 Druge obdelave in prevleke Other treatments and
coatings
oSIST prEN ISO 23216:2022 en,fr,de
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

---------------------- Page: 1 ----------------------
oSIST prEN ISO 23216:2022

---------------------- Page: 2 ----------------------
oSIST prEN ISO 23216:2022
INTERNATIONAL ISO
STANDARD 23216
First edition
2021-05
Carbon based films — Determination
of optical properties of amorphous
carbon films by spectroscopic
ellipsometry
Films à base de carbone — Détermination des propriétés optiques des
films de carbone amorphe par ellipsométrie spectroscopique
Reference number
ISO 23216:2021(E)
©
ISO 2021

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oSIST prEN ISO 23216:2022
ISO 23216:2021(E)

COPYRIGHT PROTECTED DOCUMENT
© ISO 2021
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting
on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address
below or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii © ISO 2021 – All rights reserved

---------------------- Page: 4 ----------------------
oSIST prEN ISO 23216:2022
ISO 23216:2021(E)

Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Test specimen preparation . 1
5 Apparatus . 2
6 Procedure. 2
6.1 Treatment of specimen before test . 2
6.2 Preparation for test . 2
6.3 Testing conditions for test . 2
6.4 Optical model for analysis . 3
6.5 Number of test repeats .
...

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