Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry (ISO 23216:2021)

This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.
It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.
It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.

Kohlenstoffschichten - Bestimmung der optischen Eigenschaften von amorphen Kohlenstoffschichten mittels spektroskopischer Ellipsometrie (ISO 23216:2021)

Dieses Dokument legt die spektroskopische Ellipsometrie für die Bestimmung der optischen Eigenschaften (Brechungsindex n und Extinktionskoeffizient k) und die optische Klassifizierung verschiedener Typen von amorphen Kohlenstoffschichten innerhalb der n k Ebene fest.
Es ist auf amorphe Kohlenstoffschichten anwendbar, die durch ionisiertes Verdampfen, Sputtern, Lichtbogenabscheidung, plasmaunterstützte chemische Gasphasenabscheidung, Heißdrahtverfahren und andere Verfahren abgeschieden wurden.
Es ist nicht anwendbar für Kohlenstoffschichten, die mit Metallen oder Silizium verändert worden sind, für amorphe Kohlenstoffschichten, die einen Gradienten ihrer Zusammensetzung/Eigenschaft in der Schichtdicke aufweisen, und für Farben und Lacke.

Films à base de carbone - Détermination des propriétés optiques des films de carbone amorphe par ellipsométrie spectroscopique (ISO 23216:2021)

Le présent document spécifie l'ellipsométrie spectroscopique pour la détermination des propriétés optiques (indice de réfraction n et coefficient d'extinction k) et la classification optique de différent types de films de carbone amorphe dans le plan n-k.
Il s'applique aux films de carbone amorphe déposés par évaporation ionisée, pulvérisation, dépôt par arc cathodique, dépôt chimique en phase vapeur assisté plasma (PAVCD), par filament chaud, et d'autres techniques.
Il ne s'applique pas aux films à base de carbone modifié avec des métaux ou du silicium, aux films de carbone amorphe qui ont un gradient de composition/propriété dans l'épaisseur, aux peintures et aux vernis.

Ogljikove plasti - Določanje optičnih lastnosti amorfnih ogljikovih plasti s spektroskopsko elipsometrijo (ISO 23216:2021)

General Information

Status
Published
Publication Date
08-Nov-2022
Current Stage
6060 - Definitive text made available (DAV) - Publishing
Start Date
09-Nov-2022
Due Date
07-Jul-2024
Completion Date
09-Nov-2022

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SLOVENSKI STANDARD
SIST EN ISO 23216:2023
01-januar-2023
Ogljikove plasti - Določanje optičnih lastnosti amorfnih ogljikovih plasti s
spektroskopsko elipsometrijo (ISO 23216:2021)

Carbon based films - Determination of optical properties of amorphous carbon films by

spectroscopic ellipsometry (ISO 23216:2021)
Kohlenstoffschichten - Bestimmung der optischen Eigenschaften von amorphen
Kohlenstoffschichten mittels spektroskopischer Ellipsometrie (ISO 23216:2021)

Films à base de carbone - Détermination des propriétés optiques des films de carbone

amorphe par ellipsométrie spectroscopique (ISO 23216:2021)
Ta slovenski standard je istoveten z: EN ISO 23216:2022
ICS:
25.220.99 Druge obdelave in prevleke Other treatments and
coatings
SIST EN ISO 23216:2023 en,fr,de

2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

---------------------- Page: 1 ----------------------
SIST EN ISO 23216:2023
---------------------- Page: 2 ----------------------
SIST EN ISO 23216:2023
EN ISO 23216
EUROPEAN STANDARD
NORME EUROPÉENNE
November 2022
EUROPÄISCHE NORM
ICS 25.220.99
English Version
Carbon based films - Determination of optical properties of
amorphous carbon films by spectroscopic ellipsometry
(ISO 23216:2021)

Films à base de carbone - Détermination des propriétés Kohlenstoffschichten - Bestimmung der optischen

optiques des films de carbone amorphe par Eigenschaften von amorphen Kohlenstoffschichten

ellipsométrie spectroscopique (ISO 23216:2021) mittels spektrokopischer Ellipsometrie (ISO

23216:2021)
This European Standard was approved by CEN on 30 October 2022.

CEN members are bound to comply with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this

European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references

concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN

member.

This European Standard exists in three official versions (English, French, German). A version in any other language made by

translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management

Centre has the same status as the official versions.

CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia,

Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway,

Poland, Portugal, Republic of North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Türkiye and

United Kingdom.
EUROPEAN COMMITTEE FOR STANDARDIZATION
COMITÉ EUROPÉEN DE NORMALISATION
EUROPÄISCHES KOMITEE FÜR NORMUNG
CEN-CENELEC Management Centre: Rue de la Science 23, B-1040 Brussels

© 2022 CEN All rights of exploitation in any form and by any means reserved Ref. No. EN ISO 23216:2022 E

worldwide for CEN national Members.
---------------------- Page: 3 ----------------------
SIST EN ISO 23216:2023
EN ISO 23216:2022 (E)
Contents Page

European foreword ....................................................................................................................................................... 3

---------------------- Page: 4 ----------------------
SIST EN ISO 23216:2023
EN ISO 23216:2022 (E)
European foreword

The text of ISO 23216:2021 has been prepared by Technical Committee ISO/TC 107 "Metallic and other

inorganic coatings” of the International Organization for Standardization (ISO) and has been taken over

as EN ISO 23216:2022 by Technical Committee CEN/TC 262 “Metallic and other inorganic coatings,

including for corrosion protection and corrosion testing of metals and alloys” the secretariat of which is

held by BSI.

This European Standard shall be given the status of a national standard, either by publication of an

identical text or by endorsement, at the latest by May 2023, and conflicting national standards shall be

withdrawn at the latest by May 2023.

Attention is drawn to the possibility that some of the elements of this document may be the subject of

patent rights. CEN shall not be held responsible for identifying any or all such patent rights.

Any feedback and questions on this document should be directed to the users’ national standards body.

A complete listing of these bodies can be found on the CEN website.

According to the CEN-CENELEC Internal Regulations, the national standards organizations of the

following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria,

Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland,

Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Republic of

North Macedonia, Romania, Serbia, Slovakia, Slovenia, Spain, Sweden, Switzerland, Türkiye and the

United Kingdom.
Endorsement notice

The text of ISO 23216:2021 has been approved by CEN as EN ISO 23216:2022 without any modification.

---------------------- Page: 5 ----------------------
SIST EN ISO 23216:2023
---------------------- Page: 6 ----------------------
SIST EN ISO 23216:2023
INTERNATIONAL ISO
STANDARD 23216
First edition
2021-05
Carbon based films — Determination
of optical properties of amorphous
carbon films by spectroscopic
ellipsometry
Films à base de carbone — Détermination des propriétés optiques des
films de carbone amorphe par ellipsométrie spectroscopique
Reference number
ISO 23216:2021(E)
ISO 2021
---------------------- Page: 7 ----------------------
SIST EN ISO 23216:2023
ISO 23216:2021(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2021

All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may

be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting

on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address

below or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii © ISO 2021 – All rights reserved
---------------------- Page: 8 ----------------------
SIST EN ISO 23216:2023
ISO 23216:2021(E)
Contents Page

Foreword ........................................................................................................................................................................................................................................iv

Introduction ..................................................................................................................................................................................................................................v

1 Scope ................................................................................................................................................................................................................................. 1

2 Normative references ...................................................................................................................................................................................... 1

3 Terms and definitions ..................................................................................................................................................................................... 1

4 Test specimen preparation ........................................................................................................................................................................ 1

5 Apparatus ..................................................................................................................................................................................................................... 2

6 Procedure..................................................................................................................................................................................................................... 2

6.1 Treatment of specimen before test ........................................................................................................................................ 2

6.2 Preparation for test ............................................................................................................................................................................. 2

6.3 Testing conditions for test ............................................................................................................................................................. 2

6.4 Optical model for analysis ............................................................................................................................................................. 3

6.5 Number of test repeats .................................................................................................................................................................... 3

7 Classification of test results ...................................................................................................................................................................... 3

8 Test report ................................................................................................................................................................................................................... 3

Annex A (normative) Classification method for amorphous carbon films by optical properties .........5

Bibliography ................................................................................................................................................................................................................................ 7

© ISO 2021 – All rights reserved iii
---------------------- Page: 9 ----------------------
SIST EN ISO 23216:2023
ISO 23216:2021(E)
Foreword

ISO (the International Organization for Standardization) is a worldwide federation of national standards

bodies (ISO member bodies). The work of preparing International Standards is normally carried out

through ISO technical committees. Each member body interested in a subject for which a technical

committee has been established has the right to be represented on that committee. International

organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.

ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of

electrotechnical standardization.

The procedures used to develop this document and those intended for its further maintenance are

described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the

different types of ISO documents should be noted. This document was drafted in accordance with the

editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/ directives).

Attention is drawn to the possibility that some of the elements of this document may be the subject of

patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of

any patent rights identified during the development of the document will be in the Introduction and/or

on the ISO list of patent declarations received (see www .iso .org/ patents).

Any trade name used in this document is information given for the convenience of users and does not

constitute an endorsement.

For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and

expressions related to conformity assessment, as well as information about ISO's adherence to the

World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT), see www .iso .org/

iso/ foreword .html.

This document was prepared by Technical Committee ISO/TC 107, Metallic and other inorganic coatings.

Any feedback or questions on this document should be directed to the user’s national standards body. A

complete listing of these bodies can be found at www .iso .org/ members .html.
iv © ISO 2021 – All rights reserved
---------------------- Page: 10 -----
...

SLOVENSKI STANDARD
oSIST prEN ISO 23216:2022
01-september-2022
Ogljikove plasti - Določanje optičnih lastnosti amorfnih ogljikovih plasti s
spektroskopsko elipsometrijo (ISO 23216:2021)

Carbon based films - Determination of optical properties of amorphous carbon films by

spectroscopic ellipsometry (ISO 23216:2021)
Kohlenstoffschichten - Bestimmung der optischen Eigenschaften von amorphen
Kohlenstoffschichten mittels spektrokopischer Ellipsometrie (ISO 23216:2021)

Films à base de carbone - Détermination des propriétés optiques des films de carbone

amorphe par ellipsométrie spectroscopique (ISO 23216:2021)
Ta slovenski standard je istoveten z: prEN ISO 23216
ICS:
25.220.99 Druge obdelave in prevleke Other treatments and
coatings
oSIST prEN ISO 23216:2022 en,fr,de

2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

---------------------- Page: 1 ----------------------
oSIST prEN ISO 23216:2022
---------------------- Page: 2 ----------------------
oSIST prEN ISO 23216:2022
INTERNATIONAL ISO
STANDARD 23216
First edition
2021-05
Carbon based films — Determination
of optical properties of amorphous
carbon films by spectroscopic
ellipsometry
Films à base de carbone — Détermination des propriétés optiques des
films de carbone amorphe par ellipsométrie spectroscopique
Reference number
ISO 23216:2021(E)
ISO 2021
---------------------- Page: 3 ----------------------
oSIST prEN ISO 23216:2022
ISO 23216:2021(E)
COPYRIGHT PROTECTED DOCUMENT
© ISO 2021

All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may

be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting

on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address

below or ISO’s member body in the country of the requester.
ISO copyright office
CP 401 • Ch. de Blandonnet 8
CH-1214 Vernier, Geneva
Phone: +41 22 749 01 11
Email: copyright@iso.org
Website: www.iso.org
Published in Switzerland
ii © ISO 2021 – All rights reserved
---------------------- Page: 4 ----------------------
oSIST prEN ISO 23216:2022
ISO 23216:2021(E)
Contents Page

Foreword ........................................................................................................................................................................................................................................iv

Introduction ..................................................................................................................................................................................................................................v

1 Scope ................................................................................................................................................................................................................................. 1

2 Normative references ...................................................................................................................................................................................... 1

3 Terms and definitions ..................................................................................................................................................................................... 1

4 Test specimen preparation ........................................................................................................................................................................ 1

5 Apparatus ..................................................................................................................................................................................................................... 2

6 Procedure..................................................................................................................................................................................................................... 2

6.1 Treatment of specimen before test ........................................................................................................................................ 2

6.2 Preparation for test ............................................................................................................................................................................. 2

6.3 Testing conditions for test ............................................................................................................................................................. 2

6.4 Optical model for analysis ............................................................................................................................................................. 3

6.5 Number of test repeats .................................................................................................................................................................... 3

7 Classification of test results ...................................................................................................................................................................... 3

8 Test report ................................................................................................................................................................................................................... 3

Annex A (normative) Classification method for amorphous carbon films by optical properties .........5

Bibliography ................................................................................................................................................................................................................................ 7

© ISO 2021 – All rights reserved iii
---------------------- Page: 5 ----------------------
oSIST prEN ISO 23216:2022
ISO 23216:2021(E)
Foreword

ISO (the International Organization for Standardization) is a worldwide federation of national standards

bodies (ISO member bodies). The work of preparing International Standards is normally carried out

through ISO technical committees. Each member body interested in a subject for which a technical

committee has been established has the right to be represented on that committee. International

organizations, governmental and non-governmental, in liaison with ISO, also take part in the work.

ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of

electrotechnical standardization.

The procedures used to develop this document and those intended for its further maintenance are

described in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the

different types of ISO documents should be noted. This document was drafted in accordance with the

editorial rules of the ISO/IEC Directives, Part 2 (see www .iso .org/ directives).

Attention is drawn to the possibility that some of the elements of this document may be the subject of

patent rights. ISO shall not be held responsible for identifying any or all such patent rights. Details of

any patent rights identified during the development of the document will be in the Introduction and/or

on the ISO list of patent declarations received (see www .iso .org/ patents).

Any trade name used in this document is information given for the convenience of users and does not

constitute an endorsement.

For an explanation of the voluntary nature of standards, the meaning of ISO specific terms and

expressions related to conformity assessment, as well as information about ISO's adherence to the

World Trade Organization (WTO) principles in the Technical Barriers to Trade (TBT), see www .iso .org/

iso/ foreword .html.

This document was prepared by Technical Committee ISO/TC 107, Metallic and other inorganic coatings.

Any feedback or questions on this document should be directed to the user’s national standards body. A

complete listing of these bodies can be found at www .iso .org/ members .html.
iv © ISO 2021 – All rights reserved
---------------------- Page: 6 ----------------------
oSIST prEN ISO 23216:2022
ISO 23216:2021(E)
Introduction

This document provides a determination method and a classification for optical properties of

amorphous carbon films by spectroscopic ellipsometry.
2 3

Amorphous carbon films have a structure, containing both sp and sp bonded carbon atoms and

in several cases also hydrogen. There are graphite-like, polymer-like, glass-like and diamond-like

carbon films. Because of their outstanding mechanical properties, amorphous carbon films are used

in various hard coating applications on hard metals, e.g. as protective coatings against wear and

corrosion in automotive parts. Biomedical and optical applications on alternative substrate materials

such as silicon and glass have become more and more important. Currently, amorphous carbon films

are classified into several types with regard to their chemical structures, and each type is selectively

used according to its appropriate application. For an easy classification of amorphous carbon films, an

optically quantified phase fingerprint with high accuracy is provided as a result of an international

interlaboratory comparison.

The optical properties of refractive index n and extinction coefficient k determined by spectroscopic

ellipsometry are the key quantities for the proposed classification of amorphous carbon films. The

interlaboratory comparison demonstrated that a classification within the n-k plane is feasible for

all types of amorphous carbon films. This will be beneficial for the identification of the coating type

on alternative substrate materials (such as silicon and glass) and additional industrial applications.

Spectroscopic ellipsometry as a fast and non-destructive analytical method can also be applied

to quality control and development in industrial applications, given that smooth and well-defined

substrate materials are used and appropriate modelling is applied.

This document is intended to implement recommended ellipsometric test conditions and the n-k plane

classification scheme of amorphous carbon films on silicon wafers.
This document is useful for the complementary optical
...

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