IEC TS 62607-9-1:2021

Nanomanufacturing - Key control characteristics - Part 9-1: Traceable spatially resolved nano-scale stray magnetic field measurements - Magnetic force microscopy

IEC TS 62607-9-1:2021(E) establishes a standardized method to characterize spatially varying magnetic fields with a spatial resolution down to 10 nm for flat magnetic specimens by magnetic force microscopy (MFM). MFM primarily detects the stray field component perpendicular to the sample surface. The resolution is achieved by the calibration of the MFM tip using magnetically nanostructured reference materials.

General Information

• Status: Published
• Publication Date: 13-Oct-2021
• ICS: 07.120 - Nanotechnologies
• ICS: 33.180.01 - Fibre optic systems in general
• Technical Committee: TC 113 - Nanotechnology for electrotechnical products and systems
• Drafting Committee: PT 62607-9-1 - TC 113/PT 62607-9-1
• Current Stage: PPUB - Publication issued
• Start Date: 01-Nov-2021
• Completion Date: 14-Oct-2021

Standards Content (Sample)

IEC TS 62607-9-1 ®
Edition 1.0 2021-10
TECHNICAL
SPECIFICATION
colour
inside
Nanomanufacturing – Key control characteristics –
Part 9-1: Traceable spatially resolved nano-scale stray magnetic field
measurements – Magnetic force microscopy
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IEC TS 62607-9-1 ®
Edition 1.0 2021-10
TECHNICAL
SPECIFICATION
colour
inside
Nanomanufacturing – Key control characteristics –

Part 9-1: Traceable spatially resolved nano-scale stray magnetic field

measurements – Magnetic force microscopy

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 07.120 ISBN 978-2-8322-1032-9

– 2 – IEC TS 62607-9-1:2021 © IEC 2021
CONTENTS
FOREWORD . 5
INTRODUCTION . 7
1 Scope . 9
2 Normative references . 9
3 Terms and definitions . 9
3.1 General terms . 9
3.2 General terms related to magnetic stray field characterization . 10
3.3 Terms related to the measurement method described in this document . 11
3.4 Key control characteristics measured according to this document . 16
3.5 Symbols and abbreviated terms . 17
4 General . 18
4.1 Measurement principle, general . 18
4.2 Application to scanning systems, discretization . 20
4.3 Preparation of the measurement setup . 20
4.4 Measurement principle, MFM . 20
4.4.1 General . 20
4.4.2 Field detection process . 21
LCF
4.4.3 Lever correction function F . 21
4.4.4 Effective magnetic charge density of the tip . 23
ICF
4.4.5 Characteristics of the MFM F . 23
4.4.6 Concept of calibration by deconvolution . 24
4.4.7 Regularized deconvolution approach . 25
4.5 MFM setup key control characteristics . 26
4.5.1 General . 26
4.5.2 Cantilever spring constant C . 27
4.5.3 Cantilever resonance quality factor Q . 28
4.5.4 Sensitivity of the detection and analysis electronics . 28
4.5.5 Measurement height . 29
4.5.6 Scan size, pixel resolution . 29
4.5.7 Canting angle of the cantilever in the setup . 29
4.5.8 Magnetization orientation of the tip . 29
4.5.9 Regularized deconvolution . 30
4.6 Ambient conditions during measurement . 30
4.7 Reference samples . 30
4.7.1 General . 30
4.7.2 "Well-known" and calculable reference sample . 30
4.7.3 Band domain patterns as self-referencing calibration samples . 30
4.7.4 Detailed stray field calculation procedure for perpendicularly
magnetized band domain reference samples . 31
5 Measurement procedure for calibrated magnetic field measurements . 34
5.1 Calibrated stray field measurement of a sample under test . 34
5.2 Detailed description of the measurement and calibration procedure . 35
5.3 Measurement protocol . 35
5.4 Measurement reliability . 37
5.4.1 Artefacts in MFM measurements . 37
5.4.2 Artefacts resulting from strong stray field samples . 37

5.4.3 Artefacts when measuring samples with low coercivity . 38
5.4.4 Distortion of the domain structure . 38
5.4.5 Contingency strategy . 39
5.4.6 Strategies to improve the quality of the measurements . 39
5.5 Uncertainty evaluation . 39
5.5.1 General . 39
5.5.2 Reference sample . 39
5.5.3 ICF determination . 40
5.5.4 Calibrated field measurement . 40
6 Data analysis / interpretation of results . 41
6.1 Software for data analysis . 41
7 Results to be reported . 43
7.1 General . 43
7.2 Product / sample identification . 43
7.3 Test conditions . 43
7.4 Measurement set-up specific information . 43
7.5 Test results . 44
8 Validity assessment . 44
8.1 General aspects . 44
8.2 Requirements . 45
8.3 Example. 45
ICF
8.3.1 Determination of the Instrument Calibration Function F . 45
8.3.2 Calibrated measurement . 47
Annex A (informative) Algorithm . 49
A.1 Mathematical basics . 49
A.1.1 Continuous Fourier transform versus discrete Fourier Transform . 49
A.1.2 Partial (two-dimensional) Fourier space . 49
A.1.3 Cross correlation theorem . 49
A.2 Magnetic fields in partial Fourier space . 50
A.2.1 Differentiation in partial Fourier space . 50
A.2.2 Magnetic fields in partial Fourier space . 50
A.3 Signal generation in magnetic force microscopy . 50
A.3.1 General . 50
A.3.2 MFM phase shift signal . 51
A.3.3 L-curve criterion for pseudo-Wiener filter-based deconvolution process . 52
Annex B (informative) Uncertainty evaluation . 54
B.1 Definition for instrument calibration . 54
B.2 Definition for calibrated field measurement . 54
B.3 A type uncertainty evaluation . 55
B.4 B type uncertainty evaluation . 55
B.4.1 General . 55
B.4.2 Propagation of uncertainty from the real to the Fourier domain . 55
B.4.3 Propagation of uncertainty from the Fourier to the real space domain . 56
B.4.4 Uncertainty propagation based on the Wiener filter . 57
B.4.5 Uncertainty evaluation for the tip calibration . 59
B.4.6 Uncertainty evaluation for the stray field evaluation . 60
B.5 Monte Carlo technique . 61
Bibliography . 62

– 4 – IEC TS 62607-9-1:2021 © IEC 2021

Figure 1 – Spatial resolution of magnetic stray field characterization techniques and
their possible maximum scan area . 8
Figure 2 – Field measurement with finite-size sensors . 19
Figure 3 – Schematic MFM setup . 20
LCF
Figure 4 – Lever correction function (F ) in Fourier space .
...