Nanomanufacturing - Key control characteristics - Part 9-1: Traceable spatially resolved nano-scale stray magnetic field measurements - Magnetic force microscopy

IEC TS 62607-9-1:2021(E) establishes a standardized method to characterize spatially varying magnetic fields with a spatial resolution down to 10 nm for flat magnetic specimens by magnetic force microscopy (MFM). MFM primarily detects the stray field component perpendicular to the sample surface. The resolution is achieved by the calibration of the MFM tip using magnetically nanostructured reference materials.

General Information

Status
Published
Publication Date
13-Oct-2021
Current Stage
PPUB - Publication issued
Start Date
01-Nov-2021
Completion Date
14-Oct-2021
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IEC TS 62607-9-1:2021 - Nanomanufacturing - Key control characteristics - Part 9-1: Traceable spatially resolved nano-scale stray magnetic field measurements - Magnetic force microscopy
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IEC TS 62607-9-1
®

Edition 1.0 2021-10
TECHNICAL
SPECIFICATION

colour
inside


Nanomanufacturing – Key control characteristics –
Part 9-1: Traceable spatially resolved nano-scale stray magnetic field
measurements – Magnetic force microscopy
IEC TS 62607-9-1:2021-10(en)

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IEC TS 62607-9-1

®


Edition 1.0 2021-10




TECHNICAL



SPECIFICATION








colour

inside










Nanomanufacturing – Key control characteristics –

Part 9-1: Traceable spatially resolved nano-scale stray magnetic field

measurements – Magnetic force microscopy

























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ICS 07.120 ISBN 978-2-8322-1032-9




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– 2 – IEC TS 62607-9-1:2021 © IEC 2021
CONTENTS
FOREWORD . 5
INTRODUCTION . 7
1 Scope . 9
2 Normative references . 9
3 Terms and definitions . 9
3.1 General terms . 9
3.2 General terms related to magnetic stray field characterization . 10
3.3 Terms related to the measurement method described in this document . 11
3.4 Key control characteristics measured according to this document . 16
3.5 Symbols and abbreviated terms . 17
4 General . 18
4.1 Measurement principle, general . 18
4.2 Application to scanning syst
...

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