Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer

IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.

General Information

Status
Published
Publication Date
04-Apr-2019
Current Stage
PPUB - Publication issued
Start Date
26-Apr-2019
Completion Date
05-Apr-2019
Ref Project

Buy Standard

Standard
IEC 62047-34:2019 - Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer
English language
16 pages
sale 15% off
Preview
sale 15% off
Preview

Standards Content (Sample)

IEC 62047-34
®

Edition 1.0 2019-04
INTERNATIONAL
STANDARD

colour
inside


Semiconductor devices – Micro-electromechanical devices –
Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on
wafer

IEC 62047-34:2019-04(en)

---------------------- Page: 1 ----------------------
THIS PUBLICATION IS COPYRIGHT PROTECTED
Copyright © 2019 IEC, Geneva, Switzerland

All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form
or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from
either IEC or IEC's member National Committee in the country of the requester. If you have any questions about IEC
copyright or have an enquiry about obtaining additional rights to this publication, please contact the address below or
your local IEC member National Committee for further information.


IEC Central Office Tel.: +41 22 919 02 11
3, rue de Varembé info@iec.ch
CH-1211 Geneva 20 www.iec.ch
Switzerland

About the IEC
The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes
International Standards for all electrical, electronic and related technologies.

About IEC publications
The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the
latest edition, a corrigendum or an amendment might have been published.

IEC publications search - webstore.iec.ch/advsearchform Electropedia - www.electropedia.org
The advanced search enables to find IEC publications by a The world's leading online dictionary on electrotechnology,
variety of criteria (reference number, text, technical containing more than 22 000 terminological entries in English
committee,…). It also gives information on projects, replaced and French, with equivalent terms in 16 additional languages.
and withdrawn publications. Also known as the International Electrotechnical Vocabulary

(IEV) online.
IEC Just Published - webstore.iec.ch/justpublished
Stay up to date on all new IEC publications. Just Published IEC Glossary - std.iec.ch/glossary
details all new publications released. Available online and 67 000 electrotechnical terminology entries in English and
once a month by email. French extracted from the Terms and Definitions clause of
IEC publications issued since 2002. Some entries have been
IEC Customer Service Centre - webstore.iec.ch/csc collected from earlier publications of IEC TC 37, 77, 86 and
If you wish to give us your feedback on this publication or CISPR.

need further assistance, please contact the Customer Service

Centre: sales@iec.ch.

---------------------- Page: 2 ----------------------
IEC 62047-34

®


Edition 1.0 2019-04




INTERNATIONAL



STANDARD








colour

inside










Semiconductor devices – Micro-electromechanical devices –

Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on

wafer


























INTERNATIONAL

ELECTROTECHNICAL


COMMISSION





ICS 31.080.99; 31.140 ISBN 978-2-8322-6719-6




  Warning! Make sure that you obtained this publication from an authorized distributor.


® Registered trademark of the International Electrotechnical Commission

---------------------- Page: 3 ----------------------
– 2 – IEC 62047-34:2019 © IEC 2019
CONTENTS
FOREWORD . 3
1 Scope . 5
2 Normative references . 5
3 Terms and definitions . 5
4 Test conditions . 6
4.1 Atmospheric conditions . 6
4.2 Electromagnetic conditions . 6
4.3 Vibration conditions . 6
4.4 Test system . 6
5 General provisions. 7
5.1 Certificate documents . 7
5.2 Placement and preheating time .
...

Questions, Comments and Discussion

Ask us and Technical Secretary will try to provide an answer. You can facilitate discussion about the standard in here.