IEC TS 62622:2012
(Main)Nanotechnologies - Description, measurement and dimensional quality parameters of artificial gratings
Nanotechnologies - Description, measurement and dimensional quality parameters of artificial gratings
IEC/TS 62622:2012(E), which is a technical specification, specifies the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on the categorization of measurement and evaluation methods for their determination. This specification is intended to facilitate communication among manufacturers, users and calibration laboratories dealing with the characterization of the dimensional quality parameters of artificial gratings used in nanotechnology. This specification supports quality assurance in the production and use of artificial gratings in different areas of application in nanotechnology. Whilst the definitions and described methods are universal to a large variety of different gratings, the focus is on one-dimensional (1D) and two-dimensional (2D) gratings.
General Information
Standards Content (Sample)
IEC/TS 62622
Edition 1.0 2012-10
TECHNICAL
SPECIFICATION
Nanotechnologies – Description, measurement and dimensional quality
parameters of artificial gratings
IEC/TS 62622:2012(E)
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IEC/TS 62622
Edition 1.0 2012-10
TECHNICAL
SPECIFICATION
Nanotechnologies – Description, measurement and dimensional quality
parameters of artificial gratings
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
PRICE CODE
W
ICS 07.030 ISBN 978-2-83220-394-1
– 2 – TS 62622 © IEC:2012(E)
CONTENTS
FOREWORD . 4
INTRODUCTION . 6
1 Scope . 7
2 Normative references . 7
3 Terms and definitions . 7
3.1 Basic terms . 7
3.2 Grating terms . 10
3.3 Grating types . 11
3.4 Grating quality parameter terms . 14
3.5 Measurement method categories for grating characterization . 17
4 Symbols and abbreviated terms . 18
5 Grating calibration and quality characterization methods . 18
5.1 Overview . 18
5.2 Global methods . 18
5.3 Local methods . 19
5.4 Hybrid methods . 20
5.5 Comparison of methods . 20
5.6 Other deviations of grating features . 21
5.6.1 General . 21
5.6.2 Out of axis deviations . 21
5.6.3 Out of plane deviations . 22
5.6.4 Other feature deviations . 22
5.7 Filter algorithms for grating quality characterization . 23
6 Reporting of grating characterization results . 23
6.1 General . 23
6.2 Grating specifications . 24
6.3 Calibration procedure . 24
6.4 Grating quality parameters . 24
Annex A (informative) Background information and examples . 25
Annex B (informative) Bravais lattices . 34
Bibliography . 38
Figure 1 – Example of a trapezoidal line feature on a substrate . 8
Figure 2 – Examples of feature patterns. 9
Figure 3 – Examples of 1D line gratings . 12
Figure 4 – Example of 2D gratings . 13
Figure A.1 – Result of a calibration of a 280 mm length encoder system which was
used as a transfer standard in an international comparison [31] . 27
Figure A.2 – Filtered (linear profile Spline filter with λ = 25 mm) results of Figure A.1 . 28
c
Figure A.3 – Calibration of a 1D grating by a metrological SEM . 30
Figure A.4 – Calibration of pitch and straightness deviations on a 2D grating by a
metrological SEM . 31
TS 62622 © IEC:2012(E) – 3 –
Figure A.5 – Results of an international comparison on a 2D grating by different
participants and types of instruments . 33
Figure B.1 – One-dimensional Bravais lattice . 34
Figure B.2 – The five fundamental two-dimensional Bravais lattices illustrating the
primitive vectors and and the angle φ between them . 35
a b
Figure B.3 – The 14 fundamental three-dimensional Bravais lattices . 36
Table 1 – Comparison of different categories for grating characterization methods . 21
Table A.1 – Grating quality parameters of the grating in Figures A.1 and A.2 . 28
Table A.2 – Grating quality parameters of the grating in Figure A.3. 30
Table A.3 – Grating quality parameters of the grating in Figure A.4. 32
Table B.1 – Bravais lattices volumes . 37
– 4 – TS 62622 © IEC:2012(E)
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
NANOTECHNOLOGIES – DESCRIPTION, MEASUREMENT AND
DIMENSIONAL QUALITY PARAMETERS OF ARTIFICIAL GRATINGS
FOREWORD
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IEC 62622, which is a technical specification, has been prepared within the joint working
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TS 62622 © IEC:2012(E) – 5 –
The text of this technical specification is based on the following documents:
Enquiry draft Report on voting
113/133/DTS 113/143/RVC
Full information on the voting for the approval of this technical specification can be found in
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