IEC TS 62622:2012

Nanotechnologies - Description, measurement and dimensional quality parameters of artificial gratings

IEC/TS 62622:2012(E), which is a technical specification, specifies the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on the categorization of measurement and evaluation methods for their determination. This specification is intended to facilitate communication among manufacturers, users and calibration laboratories dealing with the characterization of the dimensional quality parameters of artificial gratings used in nanotechnology. This specification supports quality assurance in the production and use of artificial gratings in different areas of application in nanotechnology. Whilst the definitions and described methods are universal to a large variety of different gratings, the focus is on one-dimensional (1D) and two-dimensional (2D) gratings.

General Information

• Status: Published
• Publication Date: 01-Oct-2012
• ICS: 01 - GENERALITIES. TERMINOLOGY. STANDARDIZATION. DOCUMENTATION
• ICS: 07.030 - Physics. Chemistry
• ICS: 07.120 - Nanotechnologies
• ICS: 33.060.30 - Radio relay and fixed satellite communications systems
• Technical Committee: TC 113 - Nanotechnology for electrotechnical products and systems
• Drafting Committee: JWG 2 - TC 113/JWG 2
• Current Stage: PPUB - Publication issued
• Start Date: 15-Dec-2012
• Completion Date: 02-Oct-2012

Standards Content (Sample)

IEC/TS 62622


Edition 1.0 2012-10




TECHNICAL



SPECIFICATION



















Nanotechnologies – Description, measurement and dimensional quality

parameters of artificial gratings





































IEC/TS 62622:2012(E)

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IEC/TS 62622


Edition 1.0 2012-10




TECHNICAL



SPECIFICATION



















Nanotechnologies – Description, measurement and dimensional quality

parameters of artificial gratings



























INTERNATIONAL

ELECTROTECHNICAL

COMMISSION

PRICE CODE
W


ICS 07.030 ISBN 978-2-83220-394-1



  Warning! Make sure that you obtained this publication from an authorized distributor.

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– 2 – TS 62622 © IEC:2012(E)
CONTENTS

FOREWORD . 4
INTRODUCTION . 6
1 Scope . 7
2 Normative references . 7
3 Terms and definitions . 7
3.1 Basic terms . 7
3.2 Grating terms . 10
3.3 Grating types . 11
3.4 Grating quality parameter terms . 14
3.5 Measurement method categories for grating characterization . 17
4 Symbols and abbreviated terms . 18
5 Grating calibration and quality characterization methods . 18
5.1 Overview . 18
5.2 Global methods . 18
5.3 Local methods .
...