ISO/TC 213/WG 16 - Areal and profile surface texture

This document specifies generic procedures for the calibration, adjustment and verification of metrological characteristics that areal topography measuring instruments have in common, as stated in ISO 25178-600. Because surface profiles can be extracted from surface topography images, most of the methods described in this document can be adapted to profiling instruments. Instrument-specific issues are not covered by this document. For example, for instruments based on mechanical probing where the probe follows an additional arcuate motion, additional measures are specified in ISO 25178-701. This document does not include procedures for area-integrating methods, although those are also stated in ISO 25178-6. For example, light scattering belongs to a class of techniques known as area-integrating methods for measuring surface topography.

This document specifies parameters for the determination of surface texture by areal methods.

This document specifies the rules for indication of surface texture by profile methods in technical product documentation by means of graphical symbols. This document does not cover population requirements. NOTE See ISO 18391 for population (batch) specifications.

This document specifies the calibration and adjustment of the metrological characteristics of contact (stylus) instruments for the measurement of surface texture by the profile method as defined in ISO 3274. The calibration and adjustment is intended to be carried out with the aid of measurement standards. Annex B specifies the calibration and adjustment of metrological characteristics of simplified operator contact (stylus) instruments which do not conform with ISO 3274.

This document specifies terms, definitions and parameters for the determination of surface texture by profile methods. NOTE 1 The main changes to previous ISO profile documents are described in Annex I. NOTE 2 An overview of profile and areal standards in the GPS matrix model is given in Annex J. NOTE 3 The relation of this document to the GPS matrix model is given in Annex K.

This document specifies the complete specification operator for surface texture by profile methods.

This document provides an unambiguous calculation of parameters PSm, RSm, WSm and Pc, Rc, Wc, as defined in ISO 4287, by means of a flowchart.

This document defines classes of geometrical defects that might be present on the surfaces of material measures and calibration specimens conforming to ISO 5436-1 and ISO 25178-70, and defines terms for ways of responding to these defects. This document is applicable as follows: a) to help customers and users of material measures for surface metrology specify their nominal features (ideal geometrical properties) when obtaining them from manufacturers and suppliers; b) to enable users of material measures to formulate their own rules and policies for responding to the occurrence of defects in such a way as to minimize the uncertainty of their own measurements; NOTE Such policies are required in ISO/IEC 17025:2017, 7.2.1.1, 7.2.1.3, 7.3.1 and 7.8.5 c) and d), for example. c) to enable calibration laboratories and their customers to agree on a common policy on how to treat defects on a material measure that has been sent for calibration; d) to educate users of material measures about the different significance and importance of different kinds of defect; e) for other GPS standards which make reference to the issue of selection of measuring locations, or selection of areas to be measured or avoided in measurement.

This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.

This document specifies the metrological characteristics of areal instruments for measuring surface topography. Because surface profiles can be extracted from surface topography images, most of the terms defined in this document can also be applied to profiling measurements.

ISO 25178-71:2017 defines Type S1 and Type S2 software measurement standards (etalons) for verifying the software of measuring instruments. It also defines the file format of Type S1 software measurement standards for the calibration of instruments for the measurement of surface texture by the areal method as defined in the areal surface texture chain of standards, chain link G. NOTE Throughout ISO 25178-71:2017, the term "softgauge" is used as a substitute for "software measurement standard Type S1".

ISO 25178-72:2017 defines the XML file format x3p for storage and exchange of topography and profile data.

ISO 25178-1:2016 specifies the rules for indication of areal surface texture in technical product documentation (e.g. drawings, specifications, contracts, reports) by means of graphical symbols.

ISO 25178-606:2015 defines the metrological characteristics of a particular non-contact method measuring surface texture using a focus variation (FV) sensor.

ISO 25178-70:2014 specifies the characteristics of material measures used for the periodic verification and adjustment of areal surface texture measurement instruments.

ISO 25178-605:2014 describes the metrological characteristics of a non-contact instrument for measuring surface texture using point autofocus probing.

ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.

This part of ISO 25178 specifies the complete specification operator for surface texture (scale limited surfaces) by areal methods.

ISO 25178-701:2010 specifies the characteristics of material measures used as measurement standards, the estimation methods of the residual errors, and the calibration methods and tests for acceptance and periodical re-verification for areal surface texture contact (stylus) measurement instruments.

ISO 25178-601:2010 defines the metrological characteristics of contact (stylus) areal surface texture measuring instruments.

ISO 25178-602:2010 specifies the design and metrological characteristics of a particular non-contact instrument for measuring surface texture using a confocal chromatic probe based on axial chromatic dispersion of white light.

ISO 25178-6:2010 describes a classification system for methods used primarily for the measurement of surface texture. It defines three classes of methods, illustrates the relationships between the classes, and briefly describes specific methods.

ISO 25178-71:2012 defines Type S1 and Type S2 software measurement standards (etalons) for verifying the software of measuring instruments. It also defines the file format of Type S1 software measurement standards for the calibration of instruments for the measurement of surface texture by the areal method as defined in the areal surface texture chain of standards, chain link 6.

ISO 25178-2:2012 specifies terms, definitions and parameters for the determination of surface texture by areal methods.