EN 60204-33:2011

Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment

IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.

Sicherheit von Maschinen - Elektrische Ausrüstungen von Maschinen - Teil 33: Anforderungen an Fertigungseinrichtungen für Halbleiter

Sécurité des machines - Equipement électrique des machines - Partie 33: Exigences pour les équipements de fabrication des semi-conducteurs

La CEI 60204-33:2009 s'applique aux équipements électriques et électroniques associés aux équipements de fabrication des semi-conducteurs pour la fabrication, les mesures, l'assemblage et les essais des semi-conducteurs. Elle s'applique aux équipements ou parties d'équipement électrique qui sont alimentés sous une tension d'alimentation nominale n'excédant pas 1 000 V en courant alternatif (c.a.) ou 1 500 V en courant continu (c.c.) et pour des fréquences nominales d'alimentation n'excédant pas 200 Hz. Pour des tensions ou des fréquences supérieures, des exigences particulières peuvent être nécessaires.

Varnost strojev - Električna oprema strojev - 33. del: Zahteve za opremo za izdelovanje polprevodnikov (IEC 60204-33:2009, spremenjen)

Ta del IEC 60204 velja za električno in elektronsko opremo, povezano z opremo za izdelovanje polprevodnikov, ki se uporablja za proizvodnjo, merjenje, sestavljanje in preskušanje polprevodnikov.
OPOMBA 1: V tem standardu izraz električni vključuje električne, elektronske in programirljive elektronske predmete (tj. električna oprema pomeni električno, elektronsko in programirljivo elektronsko opremo).
OPOMBA 2: V okviru tega standarda se izraz oseba nanaša na vse posameznike in vključuje tiste osebe, ki jih uporabnik ali njegov(-i) zastopnik(-i) določijo in usposobijo za namestitev in uporabo zadevne opreme za izdelavo ter za skrb zanjo.
Električna oprema, ki jo zajema ta standard, se začne na točki povezave napajanja z električno opremo (glej točko 5.1) in vključuje ustrezna navodila za varno namestitev.
OPOMBA 3: Za zahteve za električne inštalacije za napajanje v stavbah glej serijo IEC 60364.
Ta del velja za električno opremo ali dele električne opreme, ki obratujejo z nazivno napajalno napetostjo, ki ne presega 1000 V za izmenični tok (a.c.) in 1500 V za enosmerni tok (d.c.), in z nazivnimi frekvencami napajanja, ki ne presegajo 200 Hz. Za višje napetosti ali frekvence so morda potrebne posebne zahteve.
OPOMBA 4: Ta standard zajema tudi električno opremo, v kateri izpeljane napetosti presegajo navedene meje napajalne napetosti.
Vključene so zahteve za zaščitne ukrepe proti električnim nevarnostim in za električna zaporna vezja, ki ščitijo pred neelektričnimi nevarnostmi. Ne zajema pa vseh zahtev, ki so potrebne ali jih zahtevajo drugi standardi ali predpisi za zaščito oseb pred drugimi nevarnostmi, razen električnih (npr. kemičnimi nevarnostmi, mehanskimi nevarnostmi, nevarnostmi sevanja). Pri vsaki vrsti stroja je za zagotavljanje ustrezne varnosti treba upoštevati edinstvene zahteve.
Dodatne in posebne zahteve lahko veljajo za električno opremo za izdelovanje, ki:
 uporablja, obdeluje ali proizvaja potencialno eksploziven material;
 se uporablja v potencialno eksplozivni in/ali vnetljivi atmosferi;
 je posebej tvegana pri proizvodnji ali uporabi nekaterih materialov;
 so dvižni stroji (ki jih zajema IEC 60204-32).
Ta standard ne vključuje specifikacij za delovanje ali funkcijske značilnosti opreme za izdelovanje.
Ta standard ne obravnava morebitnih učinkov na človeško zdravje, do katerih lahko pride zaradi emisij (na primer elektromagnetnih polj, hrupa) iz opreme za izdelovanje.
Ta standard ne določa zahtev za elektromagnetno skladnost (EMC).

General Information

• Status: Published
• Publication Date: 03-Mar-2011
• Withdrawal Date: 27-Feb-2014
• ICS: 13.110 - Safety of machinery
• ICS: 25.040.30 - Industrial robots. Manipulators
• ICS: 29.020 - Electrical engineering in general
• Technical Committee: CLC/TC 44X - Safety of machinery: electrotchnical aspects
• Drafting Committee: IEC/TC 44 - IEC_TC_44
• Parallel Committee: IEC/TC 44 - IEC_TC_44
• Current Stage: 6060 - Document made available - Publishing
• Start Date: 04-Mar-2011
• Completion Date: 04-Mar-2011
• Directive: 2006/42/EC - Directive 2006/42/EC of the European Parliament and of the Council of 17 May 2006 on machinery, and amending Directive 95/16/EC (recast)
• Directive: 98/37/EC - Machinery
• Mandate: M/396 - Mandate to CEN and Cenelec for standardisation in the field of machinery
• Ref Project: SIST EN 60204-33:2011 - Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment (IEC 60204-33:2009, modified)

Standards Content (Sample)

SLOVENSKI STANDARD
01-maj-2011
9DUQRVWVWURMHY(OHNWULþQDRSUHPDVWURMHYGHO=DKWHYH]DRSUHPR]D
L]GHORYDQMHSROSUHYRGQLNRY,(&VSUHPHQMHQ
Safety of machinery - Electrical equipment of machines - Part 33: Requirements for
semiconductor fabrication equipment (IEC 60204-33:2009, modified)
Sicherheit von Maschinen - Elektrische Ausrüstungen von Maschinen - Teil 33:
Anforderungen an Fertigungsausrüstungen für Halbleiter (IEC 60204-33:2009,
modifiziert)
Sécurité des machines - Equipement électrique des machines - Partie 33: Exigences
pour les equipments de fabrication des semi-conducteurs (CEI 60204-33:2009, modifiée)
Ta slovenski standard je istoveten z: EN 60204-33:2011
ICS:
13.110 Varnost strojev Safety of machinery
31.080.01 Polprevodniški elementi Semiconductor devices in
(naprave) na splošno general
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

EUROPEAN STANDARD
EN 60204-33
NORME EUROPÉENNE
March 2011
EUROPÄISCHE NORM
ICS 13.110; 25.040.30; 29.020
English version
Safety of machinery -
Electrical equipment of machines -
Part 33: Requirements for semiconductor fabrication equipment
(IEC 60204-33:2009, modified)
Sécurité des machines -  Sicherheit von Maschinen -
Equipement électrique des machines - Elektrische Ausrüstungen
Partie 33: Exigences pour les von Maschinen -
équipements de fabrication des semi- Teil 33: Anforderungen an
conducteurs Fertigungsausrüstungen für Halbleiter
(CEI 60204-33:2009, modifiée) (IEC 60204-33:2009, modifiziert)

This European Standard was approved by CENELEC on 2011-02-28. CENELEC members are bound to comply
with the CEN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard
the status of a national standard without any alteration.

Up-to-date lists and bibliographical references concerning such national standards may be obtained on
application to the Central Secretariat or to any CENELEC member.

This European Standard exists in three official versions (English, French, German). A version in any other
language made by translation under the responsibility of a CENELEC member into its own language and notified
to the Central Secretariat has the same status as the official versions.

CENELEC members are the national electrotechnical committees of Austria, Belgium, Bulgaria, Croatia, Cyprus,
the Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy,
Latvia, Lithuania, Luxembourg, Malta, the Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia,
Spain, Sweden, Switzerland and the United Kingdom.

CENELEC
European Committee for Electrotechnical Standardization
Comité Européen de Normalisation Electrotechnique
Europäisches Komitee für Elektrotechnische Normung

Management Centre: Avenue Marnix 17, B - 1000 Brussels

© 2011 CENELEC - All rights of exploitation in any form and by any means reserved worldwide for CENELEC members.
Ref. No. EN 60204-33:2011 E
Foreword
The text of the International Standard IEC 60204-33:2009, prepared by IEC TC 44, Safety of
machinery - Electrotechnical aspects, together with common modifications prepared by the Technical
Committee CENELEC TC 44X, Safety of machinery: electrotechnical aspects, was submitted to the
formal vote and was approved by CENELEC as EN 60204-33 on 2011-02-28.
The following dates were fixed:

– latest date by which the EN has to be implemented
at national level by publication of an identical
national standard or by endorsement (dop) 2012-02-28

– latest date by which the national standards conflicting
with the EN have to be withdrawn (dow) 2014-02-28

This European Standard has been prepared under Mandate M/396 given to CENELEC by the
European Commission and the European Free Trade Association and covers essential requirements
of EC Directive 2006/42/EC. See Annex ZZ.

Annexes ZA and ZZ have been added by CENELEC.

__________
Endorsement notice
The text of the International Standard IEC 60204-33:2009 was approved by CENELEC as a European
Standard with agreed common modifications as given below.

COMMON MODIFICATIONS
4 General requirements
4.2 Selection of electrical equipment
Replace with:
4.2 Selection of electrical equipment
Electrical components and devices that are used as part of a safety related system and those that
handle hazardous voltage or hazardous electrical power shall be suitable for their intended use, be
applied in accordance with their supplier’s instructions and conform to relevant IEC standards where
such exist.
11 Controlgear: location, mounting, and enclosures
11.2.1.1 General
th
Replace the 4 paragraph with:
All controlgear shall be mounted so as to facilitate its operation and maintenance from the front.
Where a special tool is necessary to adjust, maintain, or remove a device, such a tool shall be
supplied. Where access is required for regular maintenance or adjustment, the relevant devices shall
be located between 0,4 m and 2,0 m above the servicing level. It is recommended that terminals be
at least 0,2 m above the servicing level and be so placed that conductors and cables can be easily
connected to them.
In the Bibliography, add the following notes for the standards indicated:

– 3 – EN 60204-33:2011
IEC 60034-1:2004 NOTE  Harmonized as EN 60034-1:2004 (not modified).
IEC 60204-1 NOTE  Harmonized as EN 60204-1 (not modified).
IEC 60204-32 NOTE  Harmonized as EN 60204-32 (not modified).
IEC 60309-1:1999 NOTE  Harmonized as EN 60309-1:1999 (not modified).
IEC 60364 series NOTE  Harmonized in HD 60364 series (not modified).
IEC 60364-5-54:2002 NOTE  Harmonized as HD 60364-5-54:2007 (modified).
IEC 60439-1:1999 NOTE  Harmonized as EN 60439-1:1999 (not modified).
IEC 60909 series NOTE  Harmonized in EN 60909 series (not modified).
IEC 60947-2:2006 NOTE  Harmonized as EN 60947-2:2006 (not modified).
IEC 60947-3:2008 NOTE  Harmonized as EN 60947-3:2009 (not modified).
IEC 60947-5-1 NOTE  Harmonized as EN 60947-5-1 (not modified).
IEC 60947-5-2 NOTE  Harmonized as EN 60947-5-2 (not modified).
IEC 61000-6-1 NOTE  Harmonized as EN 61000-6-1 (not modified).
IEC 61000-6-2 NOTE  Harmonized as EN 61000-6-2 (not modified).
IEC 61000-6-3 NOTE  Harmonized as EN 61000-6-3 (not modified).
IEC 61000-6-4 NOTE  Harmonized as EN 61000-6-4 (not modified).
IEC 61010-1:2001 NOTE  Harmonized as EN 61010-1:2001 (not modified).
IEC 61082-1:2006 NOTE  Harmonized as EN 61082-1:2006 (not modified).
IEC 61140:2001 NOTE  Harmonized as EN 61140:2002 (not modified).
IEC 61310-3:2007 NOTE  Harmonized as EN 61310-3:2008 (not modified).
IEC 61326 series NOTE  Harmonized in EN 61326 series (not modified).
IEC 61346 series NOTE  Harmonized in EN 61346 series (not modified).
IEC 61439-1:2009 NOTE  Harmonized as EN 61439-1:2009 (modified).
IEC 61496-1 NOTE  Harmonized as EN 61496-1 (not modified).
IEC 61558-2-16:2009 NOTE  Harmonized as EN 61558-2-16:2009 (not modified).
IEC 61800-3 NOTE  Harmonized as EN 61800-3 (not modified).
IEC 61984:2008 NOTE  Harmonized as EN 61984:2009 (not modified).
IEC/TS 62046:2008 NOTE  Harmonized as CLC/TS 62046:2008 (not modified).
ISO 13850:2006 NOTE  Harmonized as EN ISO 13850:2008 (not modified).
ISO 14122 series NOTE  Harmonized in EN ISO 14122 series (not modified).

Annex ZA
(normative)
Normative references to international publications
with their corresponding European publications

The following referenced documents are indispensable for the application of this document. For dated
references, only the edition cited applies. For undated references, the latest edition of the referenced
document (including any amendments) applies.

NOTE  Where an International Publication has been modified by common modifications, indicated by (mod), the relevant
EN/HD applies.
Publication Year Title EN/HD Year

IEC 60034-11 2004 Rotating electrical machines - EN 60034-11 2004
Part 11: Thermal protection
IEC 60038 - IEC standard voltages - -

IEC 60073 2002 Basic and safety principles for man-machine EN 60073 2002
interface, marking and identification - Coding
principles for indicators and actuators

IEC 60364-4-41 2005 Low-voltage electrical installations - HD 60364-4-41 2007
(mod) Part 4-41: Protection for safety - Protection + corr. July 2007
against electric shock
IEC 60364-4-43 2008 Low voltage electrical installations - HD 60364-4-43 2010
(mod) Part 4-43: Protection for safety - Protection
against overcurrent
IEC 60364-6 2006 Low voltage electrical installations - HD 60364-6 2007
(mod) Part 6: Verification
IEC 60417 Data- Graphical symbols for use on equipment - -
base
IEC 60445 2006 Basic and safety principles for man-machine EN 60445 2007
(mod) interface, marking and identification -
Identification of equipment terminals and
conductor terminations
IEC 60446 2007 Basic and safety principles for man-machine EN 60446 2007
interface, marking and identification -
Identification of conductors by colours or
alphanumerics
IEC 60447 2004 Basic and safety principles for man-machine EN 60447 2004
interface, marking and identification -
Actuating principles
IEC 60529 1989 Degrees of protection provided EN 60529 1991
by enclosures (IP Code) + corr. May 1993

IEC 60617 Data- Graphical symbols for diagrams - -
base
IEC 60695-11-10 1999 Fire hazard testing - EN 60695-11-10 1999
Part 11-10: Test flames - 50 W horizontal
and vertical flame test methods

IEC 60950-1 (mod) 2005 Information technology equipment - Safety - EN 60950-1 2006
Part 1: General requirements + A11 2009

– 5 – EN 60204-33:2011
Publication Year Title EN/HD Year

IEC 61010-1 2001 Safety requirements for electrical equipment EN 61010-1 2001
for measurement, control, + corr. June 2002
and laboratory use -
Part 1: General requirements
IEC 61032 1997 Protection of persons and equipment by EN 61032 1998
enclosures - Probes for verification

IEC 61310 series Safety of machinery - Indication, marking and EN 61310 series
actuation
IEC 61310-1 2007 Safety of machinery - Indication, marking and EN 61310-1 2008
actuation -
Part 1: Requirements for visual, acoustic and
tactile signals
IEC 61508 series Functional safety of EN 61508 series
electrical/electronic/programmable electronic
safety-related systems
IEC 61557-3 2007 Electrical safety in low voltage distribution EN 61557-3 2007
systems up to 1 000 V a.c. and 1 500 V d.c. -
Equipment for testing, measuring or
monitoring of protective measures -
Part 3: Loop impedance
IEC 61558-1 2005 Safety of power transformers, EN 61558-1 2005
power supplies, reactors and + corr. August 2006
similar products -
Part 1: General requirements and tests

IEC 61558-2-6 2009 Safety of transformers, reactors, EN 61558-2-6 2009
power supply units and similar products for
supply voltages up to 1 100 V -
Part 2-6: Particular requirements and tests for
safety isolating transformers and power
supply units incorporating safety isolating
transformers
IEC 61800-5-1 2007 Adjustable speed electrical power drive EN 61800-5-1 2007
systems -
Part 5-1: Safety requirements - Electrical,
thermal and energy
IEC 62061 2005 Safety of machinery - Functional safety of EN 62061 2005
safety-related electrical, electronic and + corr. February 2010
programmable electronic control systems

ISO 12100-2 2003 Safety of machinery - Basic concepts, EN ISO 12100-2 2003
general principles for design -
Part 2: Technical principles
ISO 13849 series Safety of machinery - Safety-related parts of EN ISO 13849 series
control systems
)
1999 Safety of machinery - Safety-related parts of - -
ISO 13849-1
control systems -
Part 1: General principles for design

1)
Superseded by ISO 13849-1:2006 “Safety of machinery - Safety-related parts of control systems - Part 1: General principles
for design”.
Publication Year Title EN/HD Year

ISO 13851 2002 Safety of machinery - Two-hand control - -
devices - Functional aspects and design
principles
– 7 – EN 60204-33:2011
Annex ZZ
(informative)
Coverage of Essential Requirements of EC Directives
This European Standard has been prepared under a mandate given to CENELEC by the European
Commission and the European Free Trade Association and within its scope the standard covers only
the following essential requirements out of those given in Annex I of EC Directive 2006/42/EC:
• 1.2.1
• 1.2.2
• 1.2.3
• 1.2.4.1
• 1.2.4.3
• 1.2.4.4
• 1.2.6
• 1.5.1
• 1.5.4
• 1.6.3 (for isolation of electrical supplies)
• 1.6.4 (for access to electrical equipment)
• 1.7.1.1
• 1.7.1.2
• 1.7.2 (for residual risks of an electrical nature)
• 1.7.4.2(e)
Compliance with this standard provides one means of conformity with the specified essential
requirements of the Directive concerned.
WARNING: Other requirements and other EC Directives may be applicable to the products falling
within the scope of this standard.

IEC 60204-33 ®
Edition 1.0 2009-12
INTERNATIONAL
STANDARD
NORME
INTERNATIONALE
Safety of machinery – Electrical equipment of machines –
Part 33: Requirements for semiconductor fabrication equipment

Sécurité des machines – Equipement électrique des machines –
Partie 33: Exigences pour les équipements de fabrication des semi-conducteurs

INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
COMMISSION
ELECTROTECHNIQUE
PRICE CODE
INTERNATIONALE
XF
CODE PRIX
ICS 13.110; 25.040.30; 29.020 ISBN 2-8318-1068-6
–
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