IEC 60747-18-1:2019
(Main)Semiconductor devices - Part 18-1: Semiconductor bio sensors - Test method and data analysis for calibration of lens-free CMOS photonic array sensors
Semiconductor devices - Part 18-1: Semiconductor bio sensors - Test method and data analysis for calibration of lens-free CMOS photonic array sensors
IEC 60747-18-1:2019 (E) specifies the test methods and data analysis for the calibration of lens-free CMOS photonic array sensors. This document includes the test conditions of each process, configuration of lens-free CMOS photonic array sensors, statistical analysis of test data, calibration for planarization and linearity, and test reports.
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IEC 60747-18-1 ®
Edition 1.0 2019-05
INTERNATIONAL
STANDARD
colour
inside
Semiconductor devices –
Part 18-1: Semiconductor bio sensors – Test method and data analysis for
calibration of lens-free CMOS photonic array sensors
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IEC 60747-18-1 ®
Edition 1.0 2019-05
INTERNATIONAL
STANDARD
colour
inside
Semiconductor devices –
Part 18-1: Semiconductor bio sensors – Test method and data analysis for
calibration of lens-free CMOS photonic array sensors
INTERNATIONAL
ELECTROTECHNICAL
COMMISSION
ICS 31.080.99 ISBN 978-2-8322-6909-1
– 2 – IEC 60747-18-1:2019 © IEC 2019
CONTENTS
FOREWORD . 4
INTRODUCTION . 6
1 Scope . 8
2 Normative references . 8
3 Terms and definitions . 8
4 Measurement setup . 9
4.1 General . 9
4.2 Measurement system . 9
4.2.1 Overall system . 9
4.2.2 Dark box . 11
4.2.3 Light source . 11
4.2.4 Sensor board . 11
4.2.5 Configuration parameters . 12
5 Measurement . 12
5.1 General . 12
5.2 Case 1: Fixed wavelength (λ) of light . 12
5.2.1 Planarization: At fixed λ and incident light intensity . 12
5.2.2 Linearity: Varying the incident light intensity with a fixed wavelength . 14
5.3 Case 2: Various wavelength (λ) of light . 14
6 Data analysis . 14
6.1 Data plot . 14
6.1.1 General . 14
6.1.2 Sensor screening . 16
6.2 Planarization characteristics . 16
6.2.1 Criterion of determining the reference pixel . 16
6.2.2 Lookup table of representative value for planarization calibration of
each pixel . 17
6.3 Linearity . 17
6.3.1 Criterion of linear region of each pixel . 17
6.3.2 Criterion of light intensity effective area for linearity. 18
6.3.3 Lookup table of the representative value for linearity calibration of each
pixel . 18
7 Calibration . 19
7.1 Calibration lookup table . 19
7.2 Reference for establishing the representative output value in the effective
area . 20
8 Test report . 21
Annex A (informative) Test report . 23
Test environment specification . 23
Specification of CMOS photonic array sensor . 24
A.3 Calibration lookup table . 24
Representative value look up table for planarization calibration of the sensor . 24
Representative value look up table for linearity calibration of the sensor . 25
Bibliography . 26
Figure 1 – Example of box plot. 9
Figure 2 – Example of measurement system with integrating sphere . 10
Figure 3 – Example of measurement system with incident parallel light . 10
Figure 4 – Example of photoelectric measurement schematic . 11
Figure 5 – Measurement flow . 12
Figure 6 – n trial data of frame capture . 13
Figure 7 – Two frame subtracted data . 13
Figure 8 – Dark frame subtracted data . 14
Figure 9 – Example of output electric signal non-linearity of 2D pixel array . 15
Figure 10 – Example of output electric signal non-linearity of one row of pixels . 15
Figure 11 – Example of one pixel’s output electric signal according to input light power . 16
Figure 12 – Example of determining the reference pixel . 17
Figure 13 – Example of the representative value for planarization . 17
Figure 14 – Example of light intensity effective area for linearity . 18
Figure 15 – Example of the representative value for linearity . 19
Figure 16 – Example of a simplified pixel structure and cross-sectional view with bio
reaction . 19
Figure 17 – Example of the representative value of the sensor . 21
Table 1 – Calibration lookup table . 20
Table 2 – Representative value table of the sensor . 21
– 4 – IEC 60747-18-1:2019 © IEC 2019
INTERNATIONAL ELECTROTECHNICAL COMMISSION
____________
SEMICONDUCTOR DEVICES –
Part 18-1: Semiconductor bio sensors – Test method and data analysis
for calibration of lens-free CMOS photonic array sensors
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International Standard IEC 60747-18-1 has been prepared by subcommittee 47E: Discrete
semiconductor devices, of IEC technical committee 47: Semiconductor devices.
The text of this International Standard is based on the following documents:
FDIS Report on voting
47E/643A/FD
...
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